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Volumn 205, Issue 4, 2008, Pages 949-952
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Generation of droplet-free high-power pulsed sputtering (HPPS) glow plasma with several tens of kilowatts
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Author keywords
[No Author keywords available]
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Indexed keywords
AMBIENT GASES;
APPLIED VOLTAGES;
ARGON IONS;
AVERAGE POWERS;
CONSUMED ENERGIES;
ELECTRICAL;
ENHANCED ADHESIONS;
FIELD INTERACTIONS;
GLOW DISCHARGE PLASMAS;
GLOW PLASMAS;
HIGH-POWER;
HIGHLY IONIZED;
MAGNETIC;
METALLIC PLASMAS;
METALLIC SPECIES;
OPTICAL CHARACTERISTICS;
PEAK POWERS;
PENNING DISCHARGES;
POWER DENSITIES;
PULSED POWER SOURCES;
PULSED SPUTTERING;
REPETITION RATES;
SERIES RESISTANCES;
SMOOTH COATINGS;
TITANIUM IONS;
TITANIUM SPECIES;
ARGON;
DISCHARGE (FLUID MECHANICS);
DROP FORMATION;
DROPS;
ELECTRIC DISCHARGES;
ELECTROLYSIS;
EMISSION SPECTROSCOPY;
GALLIUM ALLOYS;
GLOW DISCHARGES;
INERT GASES;
ION BOMBARDMENT;
IONIZATION;
IONIZATION OF GASES;
IONS;
MAGNETIC FIELDS;
METALLIC SOAPS;
PLASMA SOURCES;
PLASMAS;
TITANIUM;
ELECTRIC GENERATORS;
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EID: 50649119812
PISSN: 18626300
EISSN: 18626319
Source Type: Journal
DOI: 10.1002/pssa.200778304 Document Type: Article |
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Times cited : (18)
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References (5)
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