Introduction of amino groups on the surface of thin photo definable epoxy resin layers via chemical modification

Applied Surface Science

Volumn 255, Issue 21, 2009, Pages 8780-8787

  Schaubroeck, David ^a   De Baets, Johan ^a   Desmet, Tim ^b   Van Vlierberghe, Sandra ^b   Schacht, Etienne ^b   Van Calster, André ^a  

^a IMEC   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

Cyanuric chloride; Epoxy cresol novolac resin; Surface modification

Indexed keywords

CHEMICAL MODIFICATION; CHLORINE COMPOUNDS; EPOXY RESINS; SURFACE TREATMENT;

ALIPHATIC AMINES; CYANURIC CHLORIDE; DIELECTRIC RESINS; NOVOLAC RESIN; PHOTO-DEFINABLE; REACTION PARAMETERS; SURFACE CHARACTERIZATION; WET CHEMICAL REACTIONS;

SURFACE REACTIONS;

EID: 67651155748     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.06.043     Document Type: Article

References (47)

1. Siau S., Vervaet A., Nalines S., Schacht E., and Van Calster A. Journal of the Electrochemical Society 151 (2004) C816-C830
2. Siau S., Vervaet A., Nalines S., Schacht E., and Van Calster A. Journal of the Electrochemical Society 151 (2004) C831-C849
3. Siau S., Vervaet A., Van Calster A., Swennen I., and Schacht E. Applied Surface Science 237 (2004) 456-461
4. Siau S., Vervaet A., Schacht E., and Van Calster A. Journal of the Electrochemical Society 151 (2004) C133-C141
5. Siau S., Vervaet A., Schacht E., Demeter U., and Van Calster A. Thin Solid Films 495 (2006) 348-356
6. Schroer D., Nichols R.J., and Meyer H. Electrochimica Acta 40 (1995) 1487-1494
7. Ge J., Tuominen R., and Kivilahti J.K. Journal of Adhesion Science and Technology 15 (2001) 1133-1143
8. Johnson H.W., and Graham M. High-speed Signal Propagation: Advanced Black Magic (2003), Prentice Hall, Professional Technical Reference, Upper Saddle River, NJ
9. Deutsch A., Surovic C.W., Krabbenhoft R.S., Kopcsay G.V., and Chamberlin B.J. IEEE Transactions on Advanced Packaging 30 (2007) 279-287
10. Ogura T., Malcomson M., and Fernando Q. Langmuir 6 (1990) 1709-1710
11. Hajdu J.B., and Mallory G.O. Electroless Plating: Fundamentals and Applications (1990), American Electroplaters and Surface Finishers Society, Orlando (Fla.)
12. Schlesinger M., and Paunovic M. Modern Electroplating. 4th ed. (2000), Wiley, New York (N.Y.)
13. Wang Z.L., Furuya A., Yasuda K., Ikeda H., Baba T., Hagiwara M., Toki S., Shingubara S., Kubota H., and Ohmi T. Journal of Adhesion Science and Technology 16 (2002) 1027-1040
14. Asakura S., Fukutani S., and Fuwa A. Microelectronic Engineering 75 (2004) 375-382
15. Glickman E., Inberg A., Fishelson N., and Shaham-Diamand Y. Microelectronic Engineering 84 (2007) 2466-2470
16. Kim G.G., Kang J.A., Kim S.-J., Shin S.H., and Kim S.J. Journal of Alloys and Compounds 449 (2008) 184-187
17. Charbonnier M., Alami M., and Romand M. Journal of the Electrochemical Society 143 (1996) 472-480
18. Bhusari D., Hayden H., Tanikella R., Allen S.A.B., and Kohl P.A. Journal of the Electrochemical Society 152 (2005) F162-F170
19. Nicolas-Debarnot D., Pascu M., Vasile C., and Poncin-Epaillard F. Surface & Coatings Technology 200 (2006) 4257-4265
20. Inagaki N., Tasaka S., and Baba T. Journal of Adhesion Science and Technology 15 (2001) 749-762
21. Zhang Y., Tan K.L., Yang G.H., Kang E.T., and Neoh K.G. Journal of the Electrochemical Society 148 (2001) C574-C582
22. Yu Z.J., Kang E.T., and Neoh K.G. Polymer 43 (2002) 4137-4146
23. Yang G.H., Kang E.T., Neoh K.G., Zhang Y., and Tan K.L. Colloid and Polymer Science 279 (2001) 745-753
24. Yang G.H., Kang E.T., Neoh K.G., Zhang Y., and Tan K.L. Langmuir 17 (2001) 211-218
25. Tsubokawa N., and Oyanagi T. Journal of Polymer Science Part A-Polymer Chemistry 31 (1993) 1633-1637
26. Blotny G. Tetrahedron 62 (2006) 9507-9522
27. Shafer S.G., and Harris J.M. Journal of Polymer Science Part A-Polymer Chemistry 24 (1986) 375-378
28. Avramescu M.E., Sager W.F.C., and Wessling M. Journal of Membrane Science 216 (2003) 177-193
29. Siau S., Vervaet A., Degrande S., Schacht E., and Van Calster A. Applied Surface Science 245 (2005) 353-368
30. Siau S., Vervaet A., Van Vaeck L., Schacht E., Demeter U., and Van Calster A. Journal of the Electrochemical Society 152 (2005) C442-C455
31. Goldstein J. Scanning Electron Microscopy and X-ray Microanalysis. 3rd ed. (2003), Kluwer Academic/Plenum Publishers, New York
32. M. Stamm, Polymer Surfaces and Interfaces; Characterization, Modification and Applications, Springer-Verlag, Berlin Heidelberg, London.
33. Briggs D., and Grant J.T. Surface Spectra Limited. Surface analysis by Auger and X-ray Photoelectron Spectroscopy (2003), IM Publications, Chichester
34. Scofield J.H. Journal of Electron Spectroscopy and Related Phenomena 8 (1976) 129-137
35. Siau S., Vervaet A., Van Calster A., Swennen I., and Schacht E. Journal of the Electrochemical Society 151 (2004) J54-J61
36. Belton D.J., and Sullivan E. Journal of Applied Polymer Science 31 (1986) 1309-1326
37. Xyla A.G., and Koutsoukos P.G. Journal of the Chemical Society-Faraday Transactions I 85 (1989) 3165-3172
38. Herman T.S. Applied Spectroscopy 20 (1966) 159-160
39. Heckle W.A., Ory H.A., and Talbert J.M. Spectrochimica Acta 17 (1961) 600-606
40. Yan Z., Xue W.L., Zeng Z.X., and Gu M.R. Industrial & Engineering Chemistry Research 47 (2008) 5318-5322
41. Horrobin S. Journal of the Chemical Society (1963) 4130-4145
42. Mur V.I. Russian Chemical Reviews 33 (1964) 92-103
43. de Hoog P., Gamez P., Driessen W.L., and Reedijk J. Tetrahedron Letters 43 (2002) 6783-6786
44. Reimschuessel H.K., and Mcdevitt N.T. Journal of the American Chemical Society 82 (1960) 3756-3762
45. Kirk R.E., Othmer D.F., Kroschwitz J.I., and Howe-Grant M. Kirk-Othmer Encyclopedia of Chemical Technology. 4th ed. vol. 7 (1991), Wiley, New York (N.Y.) p. 834
46. Seifer G.B. Russian Journal of Coordination Chemistry 28 (2002) 301-324
47. Vorotyntseva V.D., Kuz'mina E.A., Roginskaya T.N., Finkel'shtein A.I., and Dergunov Y.I. Journal of Applied Spectroscopy 17 (1972) 1043-1046 Translated from Zhurnal Prikladnoi Spektroskopii, 17 (1972) 286-289