Capillary microchannel fabrication using plasma polymerized TMDS for fluidic MEMS technology

Journal of Micromechanics and Microengineering

Volumn 19, Issue 4, 2009, Pages

  Abbas, A ^a,b,c   Supiot, P ^b   Mille, V ^a   Guillochon, D ^c   Bocquet, B ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIV LILLE   (France)

^c Université de Lille 1 Sciences et Technologies   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS SOLUTIONS; BONDING PROCESS; CAPILLARY FORCE; CHANNEL NETWORK; CHANNEL WIDTHS; DIRECT POLYMERIZATION; EASY FABRICATION; ELECTROMAGNETIC COMPONENTS; FLOW SYSTEMS; INITIAL VELOCITIES; LITHOGRAPHIC MASK; MEMS TECHNOLOGY; MICROCHANNEL FABRICATION; MICROELECTROMECHANICAL SYSTEMS; PHOTOPATTERNED; SACRIFICIAL LAYER; SURROUNDING ENVIRONMENT;

CAPILLARITY; CHEMICAL VAPOR DEPOSITION; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MEMS; MICROCHANNELS; PLASMA DEPOSITION; PLASMA POLYMERIZATION; PLASMAS; RESERVOIRS (WATER);

POLYMERS;

EID: 67651016450     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/4/045022     Document Type: Article

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