Air-gaps for electrical interconnections

Electrochemical and Solid-State Letters

Volumn 1, Issue 1, 1998, Pages 49-51

  Kohl, Paul A ^a   Zhao, Qiang ^a,c   Patel, Kaushal ^a   Schmidt, Douglas ^a   Bidstrup Allen, Sue Ann ^a   Shick, Robert ^b   Jayaraman, S ^b  

^a Georgia Institute of Technology   (United States)

^b GOODRICH CORPORATION   (United States)

^c Allied Signal   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DECOMPOSITION; DIELECTRIC FILMS; DIELECTRIC PROPERTIES OF SOLIDS; DIFFUSION; SILICA;

ELECTRIC INTERCONNECTIONS; SACRIFICIAL POLYMER;

DIELECTRIC MATERIALS;

EID: 0032121792     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1390631     Document Type: Article

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