New technology for high throughput THz BioMEMS

Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings

Volumn , Issue , 2006, Pages 3505-3508

  Mille, V ^a   Bourzgui, N E ^a   Vivien, C ^a   Supiot, P ^a   Bocquet, B ^a  

^a UNIV LILLE   (France)

Author keywords

BioMEMS; Biosensor; Microfluidic; Microsystems; Microtechnology; Plasma polymer; Terahertz

Indexed keywords

BIOMEDICAL EQUIPMENT; ELECTROMAGNETIC PROPULSION; ENCAPSULATION; MICROFLUIDICS; POLYMERS; THROUGHPUT; WAFER BONDING;

BIOLOGICAL SOLUTIONS; MICROFLUIDIC CIRCULATION; SURFACE FUNCTIONALIZATION;

MEMS;

POLYMER; SILICON;

ARTICLE; BIOMEDICAL ENGINEERING; BIOTECHNOLOGY; ELECTROMAGNETIC FIELD; EQUIPMENT; EQUIPMENT DESIGN; GENETIC PROCEDURES; MICROFLUIDIC ANALYSIS; SURFACE PROPERTY;

BIOMEDICAL ENGINEERING; BIOSENSING TECHNIQUES; BIOTECHNOLOGY; ELECTROMAGNETIC PHENOMENA; EQUIPMENT DESIGN; MICROFLUIDIC ANALYTICAL TECHNIQUES; POLYMERS; SILICON; SURFACE PROPERTIES;

EID: 34047102011     PISSN: 05891019     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEMBS.2006.260289     Document Type: Conference Paper

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