Air-channel fabrication for microelectromechanical systems via sacrificial photosensitive polycarbonates

Journal of Microelectromechanical Systems

Volumn 12, Issue 2, 2003, Pages 147-159

  Jayachandran, Joseph Paul ^a   Reed, Hollie A ^a   Zhen, Hongshi ^a   Rhodes, Larry F ^b   Henderson, Clifford L ^a   Bidstrup, Sue Ann ^a   Kohl, Paul A ^a  

^a Georgia Institute of Technology   (United States)

^b Promerus LLC   (United States)

Author keywords

Degradation; Electrical interconnects; MEMS; Micro air channels; Microfluidics; Photosensitive; Polycarbonates; Sacrificial materials

Indexed keywords

CATALYSIS; DEGRADATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MASS SPECTROMETRY; PHOTOSENSITIVITY; POLYCARBONATES; THERMOGRAVIMETRIC ANALYSIS;

AIR-CHANNEL FABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0037387933     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.809963     Document Type: Article

References (19)

1. P. A. Kohl, Q. Zhao, K. S. Patel, D. Schmidt, S. A Bidstrup-Allen, R. Shick, and S. Jayaraman, "Air-gaps for electrical interconnections," Electrochem. Solid State Lett., vol. 1, p. 49, 1998.
2. P. A. Kohl, D. M. Bhusari, M. Wedlake, C. Case, B. C. Lee, R. J. Gutmann, and R. Shick, "Air-gaps in 0.3 μm electrical interconnections," IEEE Electron Device Lett., vol. 21, p. 557, 2000.
3. H. A. Reed, C. E. White, V. Rao, S. A. Bidstrup-Allen, C. L. Henderson, and P. A. Kohl, "Fabrication of microchannels using polycarboates as sacrificial materials," J. Micromech. Microeng., vol. 11, no. 6, p. 733, 2001.
4. D. Bhusari, H. A. Reed, M. Wedlake, A. Padovani, S. A. Bidstrup-Allen, and P. A. Kohl, "Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applications," J. Micromech. Microeng., vol. 10, no. 3, p. 400, 2001.
5. M. B. Anand, M. Yamada, and H. Shibata, "Use of gas as low k interlayer dielectric in LSI's: Demonstration of feasibility," IEEE Trans. Electron Devices, vol. 44, p. 1965, 1997.
6. C. K. Harnett, G. W. Coates, and H. G. Craighead, "Heat-depolymerizable polycabonates as electron beam patternable sacrificial layers for nanofluidics," J. Vac. Sci. Technol. B., vol. 19, no. 6, p. 2842, 2001.
7. L. S. Lee and K. K. Gleason, "Hot-filament chemical vapor deposition of polyoxymethylene as a sacrificial layer for fabricating air-gaps," Electrochem. Solid State Lett., vol. 4, p. G81, 2001.
8. H-J. Suh, P. Bharathi, D. J. Beebe, and J. S. Moore, "Dendrimic materials as dry-release sacrificial layer," J. Microelectromech. Syst., vol. 9, pp. 198-205, June 2000.
9. J. P. Gravesen, J. Branejerg, and O. S. Jensen, "Microfluidics - A review," J. Micromech. Microeng., vol. 3, p. 168, 1993.
10. R. F. Service, "Microchip arrays put DNA on the spot," Science, vol. 282, p. 396, 1998.
11. J. V. Crivello and J. H. W. Lam, "Diaryliodonium salts, a new class of photoinitiators for cationic polymerization," Macromolecules, vol. 10, no. 6, p. 1307, 1977.
12. R. Taylor, "The nature of the transition state in ester pyrolysis. Part II. The relative rates of pyrolysis of ethyl, isopropyl, and t-butyl acetates, phenylacetates, benzoates, phenyl carbonates, and N-phenylcarbamates," J. Chem. Soc. Chem. Commun., p. 1025, 1975.
13. S. Inoue, T. Tsuruta, T. Takada, N. Miyazaki, M. Kambe, and T. Takaoka, "Synthesis and thermal degradation of carbon dioxide-epoxide copolymer," Appl. Polym. Symp., vol. 26, p. 257, 1975.
14. J. M. J. Frechet, F. Bouchard, F. M. Houlihan, E. Eichler, B. Kryczka, and C. G. Wilson, "Design and synthesis of novel allyic and benzylic copolycarbonates susceptible to acidolytic or thermolytic depolymerization," Makromol. Chem. Rapid. Commun., vol. 7, p. 121, 1986.
15. S. C. Narang and S. T. Attarwala, "Chemical amplification in t-diol polycarbonate resists," Polym. Prepr., (Am. Chem. Soc. Div. Polym. Chem.), vol. 26, no. 2, p. 323, 1985.
16. D. J. Drensbourg, J. R. Wildeson, J. C. Yarbrough, and J. H. Reibenspies, "Bis2,6-difluorophenoxide dimeric complexes of zinc and cadmium and their phosphine adducts: Lessons learned relative to carbon dioxide/cyclohexene oxide alternating copolymerization processes catalyzed by zinc phenoxides," J. Amer. Chem. Soc., vol. 122, p. 12487, 2000.
17. M. Murayama, F. Sanda, and T. Endo, "Anionic ring-opening polymerization of a cyclic carbonate having a norbornene structure with amine initiators," Macromolecules, vol. 31, p. 919, 1999.
18. Y. Toba, M. Saito, and Y. Usui, "Cationic photopolymerization of epoxides by direct and sensitized photolysis of onium tetrakis(pentafluorophenyl)borate initiators," Macromolecules, vol. 32, no. 10, p. 3209, 1999.
19. J. V. Crivello, J. Lockhart, and J. Lee, "Diaryliodoinum salts as thermal initiators of cationic polymerization," J. Polym. Sci. Part A: Polym. Chem., vol. 21, p. 97, 1983.