Comparative investigation of TiAlC(N), TiCrAlC(N), and CrAlC(N) coatings deposited by sputtering of M{cyrillic}A{cyrillic}Kh{cyrillic}-phase Ti2 - kh{cyrillic}Crkh{cyrillic}AlC targets

Surface and Coatings Technology

Volumn 203, Issue 23, 2009, Pages 3595-3609

  Shtansky, D V ^a   Kiryukhantsev Korneev, Ph V ^a   Sheveyko, A N ^a   Mavrin, B N ^b   Rojas, C ^c   Fernandez, A ^c   Levashov, E A ^a  

^a NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

^b INSTITUTE OF SPECTROSCOPY   (Russian Federation)

^c UNIVERSITY OF SEVILLE   (Spain)

Author keywords

Composite targets; Magnetron sputtering; Max phases; Mechanical and tribological properties; Structure

Indexed keywords

COMPOSITE TARGETS; DRY MILLING; ELASTIC RECOVERY; ELECTROCHEMICAL BEHAVIORS; FRICTION COEFFICIENTS; GASEOUS MIXTURE; GLOW-DISCHARGE OPTICAL EMISSION SPECTROSCOPY; HIGH CR CONTENT; HIGH CR STEEL; HIGH HARDNESS; HIGH TEMPERATURE OXIDATION RESISTANCE; HIGH THERMAL STABILITY; IN-VACUUM; LOW FRICTION COEFFICIENTS; MAX-PHASES; MECHANICAL AND TRIBOLOGICAL PROPERTIES; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY; STRUCTURE; STRUCTURE AND PROPERTIES; THERMAL STABILITY; WEAR RATES;

AMORPHOUS FILMS; ATOMIC SPECTROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHROMATE COATINGS; CHROMIUM; CORROSION RESISTANCE; ELECTROCHEMICAL PROPERTIES; ELECTRON ENERGY LOSS SPECTROSCOPY; EMISSION SPECTROSCOPY; ENERGY DISSIPATION; FRICTION; GLOW DISCHARGES; HARDENING; HARDNESS; INORGANIC COATINGS; MAGNETRONS; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; OPTICAL MICROSCOPY; OXIDATION; OXIDATION RESISTANCE; SPECTRUM ANALYSIS; STRUCTURAL PROPERTIES; TARGETS; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; TUNGSTEN CARBIDE;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 67649482283     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.05.036     Document Type: Article

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