X-Ray photoelectron spectroscopy characterization of reactively sputtered Ti-B-N thin films

Surface and Coatings Technology

Volumn 187, Issue 1, 2004, Pages 98-105

  Lu, Y H ^a   Zhou, Z F ^a   Sit, P ^a   Shen, Y G ^a   Li, K Y ^a   Chen, Haydn ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Boron; Hardness; Microstructure; Thin films; Ti B N; X Ray photoelectron spectroscopy (XPS)

Indexed keywords

MICROSTRUCTURE; SUBSTRATES; THERMODYNAMIC STABILITY; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

MOLE FRACTION; MULTIPHASE MICROSTRUCTURE; NANOINDENTATION;

TITANIUM COMPOUNDS;

COATING;

EID: 18244391460     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.11.024     Document Type: Article

References (22)

1. Gissler W. Surf. Coat. Technol. 68-69 1994 556
2. Veprek S. J. Vac. Sci. Technol. A 17 5 1999 2401
3. Novotny H. Benesovsky F. Brukl C. Schob O. Mh. Chem. 92 1961 403
4. Knotek O. Loffler F. Bohmer M. Stossel C. Surf. Coat. Technol. 49 1991 263
5. Karner H. Laimer J. Störi H. Rödhammer P. Surf. Coat. Technol. 39-40 1989 293
6. Selbach E. Schmidt K. Wang M. Thin Solid Films 188 1990 267
7. Baker M.A. Mollart T.P. Gibson P.N. Gissier W. J.Vac. Sci. Technol. A 15 2 1997 284
8. Veprek S. Nesládek P. Niederhofer A. Glatz F. J́lek M. Š́ma M. Surf. Coat. Technol. 108-109 1998 138
9. Baker M.A. Steiner A. Haupt J. Gissler W. J. Vac. Sci. Technol. A 13 3 1995 16-33
10. Ruby C. Ott R. Huang F. Weaver M.L. Barnard J.A. Surf. Interface Anal. 29 2000 823
11. Shirley D.A. Phys. Rev. B 5 1972 4709
12. Karvankova P. Veprek-Heijman M.G.J. Bergmaier A. Veprek S. Surf. Coat. Technol. 163-164 2003 149
13. Heau C. Fillit R.Y. Vaux F. Pascaretti F. Surf. Coat. Technol. 120-121 1999 200
14. Wiedemann R. Weihnacht V. Oettel H. Surf. Coat. Technol. 116-119 1999 302
15. John A.D. Lange's Handbook of Chemistry 1999 Mcgraw-hill. Inc New York
16. Rogl P. Schuster J.C. (Eds.,), Phase Diagrams of Ternary Boron Nitride and Silicon Nitride Systems 1992 ASM International Materials Park, OH
17. Ier Strydom I. Hofmann S. J. Electron. Spectrosc. Relat. Phenom. 56 1991 85
18. Huang F. Liu W.J. J. Mater. Res. 17 4 2002 805
19. Andrievski R.A. J. Solid State Chem. 133 1997 249
20. Veprek S. Christiansen S. Albrecht M. Strunk H.P. Mater. Res. Soc. Symp. Proc. 457 1997 407
21. Gupper A. Fernandez A. Fernandez-Ramos C. Monatshefte fur Chemie 12 2002 837
22. Veprek S. Argon A.S. Surf. Coat. Technol. 146-147 2001 175