Micro-hardness, microstructures and thermal stability of (Ti,Cr,Al,Si)N films deposited by cathodic arc method

Vacuum

Volumn 82, Issue 5, 2008, Pages 476-481

  Ezura, H ^a   Ichijo, K ^a   Hasegawa, H ^b   Yamamoto, K ^c   Hotta, A ^a   Suzuki, T ^a  

^a KEIO UNIVERSITY   (Japan)

^b OKAYAMA UNIVERSITY   (Japan)

^c KOBE STEEL LTD   (Japan)

Author keywords

(Ti,Cr,Al,Si)N; Cutting tools; PVD; Thermal stability; Thin films

Indexed keywords

CATHODES; CHROMIUM ALLOYS; CUTTING TOOLS; ELECTRIC ARCS; MICROHARDNESS; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; THERMODYNAMIC STABILITY; TITANIUM ALLOYS;

ANNEALING TEMPERATURE; CATHODIC ARC METHOD; PHASE SEGREGATION; TICRALSI ALLOY CATHODES;

THIN FILMS;

EID: 37049028118     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.048     Document Type: Article

References (18)

1. Fox-Rabinovich G.S., Yamomoto K., Veldhuis S.C., Kovalev A.I., and Dosbaeva G.K. Surf Coat Technol 200 (2005) 1804-1813
2. Lewis D.B., Donohue L.A., Lembke M., Münz W.D., Kuzel Jr. R., Valvoda V., et al. Surf Coat Technol 114 (1999) 187
3. Knotek O. Thin Solid Films 153 (1987) 83
4. Sproul W.D., Graham M.E., Wong M.S., and Rudnik P.J. Surf Coat Technol 61 (1993) 139
5. Tanaka Y., Ichimiya N., Onishi Y., and Yamada Y. Surf Coat Technol 146/147 (2001) 215
6. Sugishima A., Kajioka H., and Makino Y. Surf Coat Technol 97 (1997) 590
7. Hasegawa H., and Suzuki T. Surf Coat Technol 188/189 (2004) 234
8. Yamamoto K., Sato T., Takahara K., and Hanaguri K. Surf Coat Technol 174/175 (2003) 62
9. Hultman L. Vacuum 57 (2000) 1
10. Hörling A., Hultman L., Odén M., Sjölén J., and Karlsson L. J Vac Sci Technol, A: Vac Surf Films 20 5 (2002) 1815
11. Santana A.E., Karimi A., Derflinger V.H., and Schütze A. Tribol Lett 17 (2003) 689
12. Hasegawa H., Yamamoto T., Suzuki T., and Yamamoto K. Surf Coat Technol 200 (2005) 2864
13. Cullity B.D. Elements of X-ray diffraction (1956), Addison-Wesley Pub. Co., Reading, MA
14. Ichijo K., Hasegawa H., and Suzuki T. Surf Coat Technol 201 (2007) 5477
15. Mayrhofer P.H., Hörling A., Karnelsson L., Sjölén J., Larsson T., Mitterer C., et al. Appl Phys Lett 83 (2003) 2049
16. Santana A.E., Karimi A., Derflinger V.H., and Schütze A. Thin Solid Films 469/470 (2004) 339
17. Hörling A., Hultman L., Odén M., Sjölén J., and Karlsson L. Surf Coat Technol 191 (2005) 384
18. Göbel T., Menzel S., Hecker M., Brücker W., Wetzig K., and Genzel C. Surf Coat Technol 142-144 (2001) 861