Phase composition of Cr-C thin films deposited by a double magnetron sputtering system

Surface and Interface Analysis

Volumn 30, Issue 1, 2000, Pages 544-548

  Groudeva Zotova, S ^a   Vitchev, R G ^b   Blanpain, B ^b  

^a INSTITUTE OF ELECTRONICS   (Bulgaria)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBIDES; CRYSTALLINE MATERIALS; ELECTRIC RESISTANCE; MAGNETRON SPUTTERING; PHASE COMPOSITION; SCANNING ELECTRON MICROSCOPY; SOLID SOLUTIONS; SPUTTER DEPOSITION; STOICHIOMETRY; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

METASTABLE CARBIDES; MICROCRYSTALLINE MATERIALS;

PROTECTIVE COATINGS;

EID: 0034245322     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200008)30:1<544::AID-SIA814>3.0.CO;2-7     Document Type: Article

References (19)

1. Agarwal V, Vankar VD, Chopra KL. Thin Solid Films 1989; 169: 281.
2. Aubert A, Chevallier J, Gaucher A, Terrat J-P. US Patent 4,486,285, 4 Dec. 1984.
3. Maréchal N, Quesnel E, Pauleau Y. J. Mater. Res. 1994; 9: 1820.
4. Henderson R, Shreve G, Tenhover M. US Patent 4,701,226, Oct. 20, 1987.
5. Aubert A, Danroc J, Gucher A, Terrat JP. Thin Solid Films 1985; 126: 61.
6. Agarwal V, Vankar VD, Chopra KL J. Vac. Sci. Technol. A 1988; A6: 2341.
7. Bewilogua H, Heinitz H-J, Rau B, Schulze S. Thin Solid Films 1988; 167: 233.
8. Cholvy G, Derep JL, Gantois M. Thin Solid Films 1985; 126: 51.
9. Holleck H. J. Vac. Sci. Technol. A 1986; A4: 2661.
10. Groudeva-Zotova S, Jacob W, Orlinov V. Rev. La Vide Sci. Tech. Appl. 1995; 275: 471.
11. Groudeva-Zotova S. Vacuum 1998; 51: 119.
12. Groudeva-Zotova S, Zotov N, Rodriguez Jaren LM, Jimenez-Garay R. Rev. La Vide Sci. Tech. Appl. 1996; 279: 149.
13. American Society for Metals, Metals Handbook, vol. 8. ASM: Metals Park, OH, 1973.
14. Groudeva-Zotova S, Jacob W, Orlinov V, Grigorov G. In Proc. Sci. Conf. Manufacturing Technology, 19-21 April 1995, Russe, Bulgaria, Sect. 3 Heat Treatment and Coatings, 117-119.
15. Chudoba T. PhD Thesis, TU Dresden, 1996; FZR Report 143, July 1996.
16. Detroye M, Reniers F, Buess-Herman C, Vereecken J. Appl. Surf. Sci. 1997; 120: 85.
17. West RC. Handbook of Chemistry and Physics (50th edn). CRC Press: Cleveland, OH, 1975/1976.
18. Chastain J, King Jr RC. Handbook of XPS. Physical Electronics: Eden Prairie, MN, 1992.
19. Detroye M, Reniers F, Buess-Herman C, Vereecken J. Appl. Surf. Sci. 1999; 144/145: 78.