Coupled nonlinear effects of surface roughness and rarefaction on squeeze film damping in MEMS structures

Journal of Micromechanics and Microengineering

Volumn 14, Issue 10, 2004, Pages 1430-1437

  Pandey, Ashok Kumar ^a   Pratap, Rudra ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CAPACITANCE; DAMPING; ENERGY DISSIPATION; FAST FOURIER TRANSFORMS; FLOW OF FLUIDS; SURFACE ROUGHNESS;

MEMS; RAREFACTION; REYNOLDS EQUATIONS; SQUEEZE FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 7044235547     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/10/020     Document Type: Article

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