Estimation of the damping in mems inertial sensors: Comparison between numerical and experimental results both at high and low pressure levels

Proceedings of 8th Biennial ASME Conference on Engineering Systems Design and Analysis, ESDA2006

Volumn 2006, Issue , 2006, Pages

  Braghin, Francesco ^a   Leo, Elisabetta ^a   Resta, Ferruccio ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; MICROELECTROMECHANICAL DEVICES; NAVIER STOKES EQUATIONS; PARAMETER ESTIMATION; VISCOSITY;

FLOW DAMPING; MOLECULAR FLUID THEORY; MULTIPHYSICS CODE; SQUEEZE FILM DAMPING;

MICROSENSORS;

EID: 33845757158     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/esda2006-95549     Document Type: Conference Paper

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