Structural, electrical, optical, and mechanical characterizations of decorative ZrO xN y thin films

Journal of Applied Physics

Volumn 98, Issue 2, 2005, Pages

  Carvalho, P ^a   Vaz, F ^a   Rebouta, L ^a   Cunha, L ^a   Tavares, C J ^a   Moura, C ^a   Alves, E ^b   Cavaleiro, A ^c   Goudeau, Ph ^d   Le Bourhis, E ^d   Rivire J P ^d   Pierson, J F ^e   Banakh, O ^f  

^a UNIVERSITY OF MINHO   (Portugal)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^c UNIVERSITY OF COIMBRA   (Portugal)

^d UNIVERSITÉ DE POITIERS   (France)

^e FEMTO ST INSTITUTE   (France)

^f University of Applied Sciences   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

LATTICE DISTORTIONS; MECHANICAL CHARACTERIZATION; PEAK INTENSITY; STRUCTURAL PARAMETERS;

BANDWIDTH; CHARACTERIZATION; CRYSTALLOGRAPHY; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; MICROHARDNESS; OPTICAL PROPERTIES; RESIDUAL STRESSES; ZIRCONIUM COMPOUNDS;

THIN FILMS;

EID: 23844434953     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1990261     Document Type: Article

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