Structural evolution of Ti-Al-Si-N nanocomposite coatings

Vacuum

Volumn 83, Issue 10, 2009, Pages 1206-1212

  Carvalho, S ^a   Rebouta, L ^a   Ribeiro, E ^a   Vaz, F ^a   Tavares, C J ^a   Alves, E ^b   Barradas, N P ^b   Riviere, J P ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^c UNIVERSITÉ DE POITIERS   (France)

Author keywords

Magnetron sputtering; Solid solution hardening; Superhard nanocomposites; Ti Al Si N

Indexed keywords

A-THERMAL; CRITICAL VALUE; DE-MIXING; DEPOSITION CONDITIONS; LATTICE PARAMETERS; MULTI PHASE SYSTEMS; NANO-COMPOSITE COATING; NITROGEN FLOW; PREFERENTIAL GROWTH; RF REACTIVE MAGNETRON SPUTTERING; ROTATION MODE; SOLID SOLUTION HARDENING; STRUCTURAL ARRANGEMENT; STRUCTURAL EVOLUTION; SUPERHARD NANOCOMPOSITES; THERMODYNAMIC EQUILIBRIA; TI-AL-SI-N;

CRYSTALLIZATION; FILM PREPARATION; HARDENING; MAGNETRONS; NANOCOMPOSITES; SEGREGATION (METALLOGRAPHY); SILICON; SOLID SOLUTIONS; SOLIDIFICATION; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

ALUMINUM;

EID: 67349180982     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.03.009     Document Type: Article

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