Synthesis and characterization of continuous freestanding silicon carbide films with polycarbosilane (PCS)

Journal of the European Ceramic Society

Volumn 29, Issue 10, 2009, Pages 2079-2085

  Yao, Rongqian ^a   Feng, Zude ^a   Yu, Yuxi ^a   Li, Siwei ^a   Chen, Lifu ^a   Zhang, Ying ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

Electron beam irradiation; Freestanding SiC films; Microstructure; Oxidation induced crosslinking; Photoluminescence

Indexed keywords

BLUE EMISSIONS; CROSSLINKED; ELECTRON BEAM IRRADIATION; FREE CARBONS; FREESTANDING SIC FILMS; HIGH DENSITIES; HIGH TEMPERATURES; MELT-SPUN; MICRO-ELECTRO MECHANICAL SYSTEMS; NANO-CRYSTALS; OPTO-ELECTRONIC PROPERTIES; PHOTOLUMINESCENCE SPECTRUM; POLYCARBOSILANE; POTENTIAL APPLICATIONS; SILICON CARBIDE FILMS; SURFACE HARDNESS; SYNTHESIS AND CHARACTERIZATIONS;

AMORPHOUS CARBON; CRYSTAL MICROSTRUCTURE; ELECTRON BEAMS; EMISSION SPECTROSCOPY; FILMS; IRRADIATION; MELT SPINNING; MEMS; MICROELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; OXIDATION; PHOTOLUMINESCENCE; POLYSILANES; SILANES;

SILICON CARBIDE;

EID: 67349103069     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2008.11.019     Document Type: Article

References (38)

1. Brutsch R. Chemical vapor deposition of silicon carbide and its applications. Thin Solid Films 126 (1985) 313-318
2. Golecki I., Reidinger F., and Marti J. Single-crystalline, epitaxial cubic SiC films grown on (1 0 0) Si at 750 °C by chemical vapor deposition. Appl. Phys. Lett. 60 14 (1992) 1703-1705
3. Colombo P., Martucci A., Fogato O., and Villoresi P. Silicon carbide films by laser pyrolysis of polycarbosilane. J. Am. Ceram. Soc. 84 1 (2001) 224-226
4. Feng Z.C. Second order Raman scattering of cubic silicon carbide. In: Fredericks P.M., Frost R.L., and Rintoul L. (Eds). Proceedings of the XIXth International Conference on Raman Spectroscopy (2004), CSIRO Publishing, Gold Coast, Queensland, Australia 242-243
5. Katharria Y.S., Kumar S., Prakash R., Choudhary R.J., Singh F., Phase D.M., and Kanjilal D. Characterizations of pulsed laser deposited SiC thin films. J. Non-Cryst. Solids 353 52-54 (2007) 4660-4665
6. Sha Z.D., Wu X.M., and Zhuge L.J. Initial study on the structure and photoluminescence properties of SiC films doped with Al. Appl. Surf. Sci. 252 12 (2006) 4340-4344
7. Polychroniadis E., Syvajarvi M., Yakimova R., and Stoemenos J. Microstructural characterization of very thick freestanding 3C-SiC wafers. J. Cryst. Growth 263 1-4 (2004) 68-75
8. Yajima S., Hayashi J., and Omori M. Continuous silicon carbide fibers of high tensile strength. Chem. Lett. 9 (1975) 931-934
9. Yajima S., Hasegawa Y., Okamura K., and Matsuzawa T. Development of high tensile strength silicon carbide fiber using an organosilicon polymer precursor. Nature 273 5663 (1978) 525-527
10. Chu C.-J., Soraru G.D., Babonneau F., and Mackenzie J.D. Preparation and characterization of amorphous SiC film by a liquid route. In: Rahman M.M., and Harris G.L. (Eds). Springer Proceedings in Physics, vol. 43, Amorphous and Crystalline Silicon Carbide and Related Materials II (1989), Springer-Verlag, Berlin, FRG 66-71
11. Chu C.-J., Liimatta E., and Mackenzie J.D. Doped amorphous SiC, mixed carbide and oxycarbide thin films by a liquid route. Mater. Res. Soc. Symp. Proc. 162 (1990) 421-426
12. Colombo P., Paulson T.E., and Pantano C.G. Synthesis of silicon carbide thin films with polycarbosilane (PCS). J. Am. Ceram. Soc. 80 9 (1997) 2333-2340
13. Pivin J.C., Colombo P., and Soraru G.D. Comparison of ion irradiation effects in silicon-based preceramic thin films. J. Am. Ceram. Soc. 83 4 (2000) 713-720
14. Stark B. MEMS Reliability Assurance Guidelines for Space Applications (1999), Jet. Propulsion Laboratory, NASA, JPL Publication pp. 69-90
15. Nagasawa H., and Yagi K. 3C-SiC single crystal films grown on 6-inch Si substrates. Phys. Stat. Sol. B 202 1 (1997) 335-358
16. Yang H., Deschatelets P., Brittain S.T., and Whitesides G.M. Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography. Adv. Mater. 13 1 (2001) 54-58
17. Chung G.-S. Characteristics of SiCN microstructures for harsh environment and high-power MEMS applications. Microelectron. J. 38 8-9 (2007) 888-893
18. Hanemann T., Ade M., Borner M., Motz G., Schulz M., and Hausselt J. Microstructuring of preceramic polymers. Adv. Eng. Mater. 4 11 (2002) 869-873
19. Liew L.-A., Zhang W.G., An L.N., Shah S., Luo R.L., Liu Y.P., Cross T., Dunn M.L., Bright V., Daily J.W., Raj R., and Anseth K. Ceramic MEMS-new materials, innovative processing and future applications. Am. Ceram. Soc. Bull. 80 5 (2001) 25-30
20. Liew L.-A., Liu Y.P., Luo R.L., Cross T., An L.N., Bright V.M., Dunn M.L., Daily J.W., and Raj R. Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer. Sens. Actuators A-Phys. 95 2-3 (2002) 120-134
21. Liew L.-A., Bright V.M., and Raj R. A novel micro glow plug fabricated from polymer-derived ceramics: in situ measurement of high-temperature properties and application to ultrahigh-temperature ignition. Sens. Actuators A-Phys. 104 3 (2003) 246-262
22. Liew L.-A., Saravanan R.A., Bright V.M., Dunn M.L., Daily J.W., and Raj R. Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators. Sens. Actuators A-Phys. 103 1-2 (2003) 171-181
23. Schulz M., Borner M., Gottert J., Hanemann T., Hausselt J., and Motz G. Cross-linking behavior of preceramic polymers effected by UV- and synchrotron radiation. Adv. Eng. Mater. 6 8 (2004) 676-680
24. Schulz M., Borner M., Hausselt J., and Heldele R. Polymer derived ceramic microparts from X-ray lithography: cross-linking behavior and process optimization. J. Eur. Ceram. Soc. 25 2-3 (2005) 199-204
25. Pham T.A., Kim D.-P., Lim T.-W., Park S.-H., Yang D.-Y., and Lee K.-S. Three-dimensional SiCN ceramic microstructures via nano-stereolithography of inorganic polymer photoresists. Adv. Funct. Mater. 16 9 (2006) 1235-1241
26. Lee H.-J., Yoon T.-H., and Kim D.-P. Fabrication of microfluidic channels derived from a UV/thermally cured preceramic polymer via a soft lithographic technique. Microelectron. Eng. 84 12 (2007) 2892-2895
27. Okamura K., and Seguchi T. Application of radiation curing in the preparation of polycarbosilane-derived SiC fibers. J. Inorg. Organomet. Polym. 2 1 (1992) 171-179
28. Youngblood G.E., Jones R.H., Kohyama A., and Snead L.L. Radiation response of SiC-based fibers. J. Nucl. Mater. 258-263 (1998) 1551-1556
29. He G.W., Shibayama T., and Takahashi H. Microstructural evolution of Hi-Nicalon™ SiC fibers annealed and crept in various oxygen partial pressure atmospheres. J. Mater. Sci. 35 5 (2000) 1153-1164
30. Kleebe H.-J., Braue W., Schmidt H., Pezzotti G., and Ziegler G. Transmission electron microscopy of microstructures in ceramic materials. J. Eur. Ceram. Soc. 16 3 (1996) 339-351
31. Nakano H., Watari K., Kinemuchi Y., Ishizaki K., and Urabe K. Microstructural characterization of high-thermal-conductivity SiC ceramics. J. Eur. Ceram. Soc. 24 14 (2004) 3685-3690
32. Mehregany M., and Zorman C.A. SiC MEMS: opportunities and challenges for applications in harsh environments. Thin Solid Films 355-356 (1999) 518-524
33. Chollon G., Pailler R., Canet R., and Delhaes P. Correlation between microstructure and electrical properties of SiC-based fibers derived from organosilicon precursors. J. Eur. Ceram. Soc. 18 6 (1998) 725-733
34. Tan C., Wu X.L., Deng S.S., Huang G.S., Liu X.N., and Bao X.M. Blue emission from silicon-based β-SiC films. Phys. Lett. A 310 2-3 (2003) 236-240
35. 1.5 gel into a SiCO glass. Vib. Spectrosc. 45 1 (2007) 61-68
36. Pivin J.C., and Sendova-Vassileva M. Visible photoluminescence of ion irradiated polysiloxane films. Solid State Commun. 106 3 (1998) 133-138
37. Pivin J.C., Colombo P., Martucci A., Soraru G.D., Pippel E., and Sendova-Vassileva M. Ion beam induced conversion of Si-based polymers and gels layers into ceramics coatings. J. Sol-Gel Sci. Technol. 26 1-3 (2003) 251-255
38. Ferraioli L., Ahn D., Saha A., Pavesi L., and Raj R. Intensely photoluminescent pseudo-amorphous SiliconOxyCarboNitride polymer-ceramic hybrids. J. Am. Ceram. Soc. 91 7 (2008) 2422-2424