Synthesis of silicon carbide thin films with polycarbosilane (PCS)

Journal of the American Ceramic Society

Volumn 80, Issue 9, 1997, Pages 2333-2340

  Colombo, Paolo ^a,c   Paulson, Thomas E ^b,c   Pantano, Carlo G ^b,c  

^a UNIVERSITY OF PADOVA   (Italy)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

^c AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROSTRUCTURE; POLYMERS; PYROLYSIS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON CARBIDE; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

GLANCING ANGLE X RAY DIFFRACTOMETRY; POLYCARBOSILANE;

CERAMIC COATINGS;

EID: 0031237946     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1997.tb03124.x     Document Type: Article

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