Comparison of ion irradiation effects in silicon-based preceramic thin films

Journal of the American Ceramic Society

Volumn 83, Issue 4, 2000, Pages 713-720

  Pivin, Jean C ^a   Colombo, Paolo ^b,c   Sorarù, Gian D ^d,e  

^a 91405 Orsay Campus   (France)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c Unita CISM GNSM Padova   (Italy)

^d UNIVERSITY OF TRENTO   (Italy)

^e Ospedale di Trento   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; HARDNESS TESTING; ION BEAMS; ION BOMBARDMENT; PLASTIC FILMS; POLYSILANES; PYROLYSIS; REACTION KINETICS; SILICONES; THERMAL EFFECTS; THIN FILMS;

ION BEAM ANALYSIS; POLYCARBOSILANES; POLYSILAZANES; RADIOLYSIS;

CERAMIC COATINGS;

EID: 0033907829     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.2000.tb01264.x     Document Type: Article

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