Study of the pyrolysis process of an hybrid CH3SiO1.5 gel into a SiCO glass

Vibrational Spectroscopy

Volumn 45, Issue 1, 2007, Pages 61-68

  Das, Gobind ^a   Bettotti, Paolo ^a   Ferraioli, Luigi ^a   Raj, Rishi ^b   Mariotto, Gino ^a   Pavesi, Lorenzo ^a   Sorarù, Gian Domenico ^a  

^a UNIVERSITY OF TRENTO   (Italy)

^b UCB 450   (United States)

Author keywords

FT IR and Raman spectroscopy; Photoluminescence; Polymer pyrolysis; Silicon oxycarbide

Indexed keywords

ARGON; MICROSTRUCTURAL EVOLUTION; PHOTOLUMINESCENCE; POLYMERS; PYROLYSIS; RAMAN SCATTERING; SILICON COMPOUNDS; SOL-GEL PROCESS;

CARBON PRECIPITATION; POLYMER PYROLYSIS; SILICON OXYCARBIDE;

GELS;

EID: 34848923718     PISSN: 09242031     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vibspec.2007.07.001     Document Type: Article

References (43)

1. Parmentier J., Soraru G.D., and Babonneau F. J. Eur. Ceram. Soc. 21 (2001) 817
2. Flores A., Martos C., Cortes S.S., Rubio F., Rubio J., and Oteo J.L. J. Am. Ceram. Soc. 87 (2004) 2093
3. Walter S., Soraru G.D., Brequel H., and Enzo S. J. Eur. Ceram. Soc. 22 (2002) 2389
4. Im S., Srivastava N., Banerjee K., and Goodson K.E. IEEE Trans. Electr. Dev. 52 (2005) 2710
5. El-Safty Sherif A., Hanaoka T., and Mizukami F. Adv. Mater. 17 (2005) 47
6. Nghiem Q.D., Chob S.J., and Kim D.-P. J. Mater. Chem. 16 (2006) 558
7. Burns G.T., Taylor R.B., Xu Y., Zangvil A., and Zank G.A. Chem. Mater. 4 (1992) 1313
8. Soraru G.D., D'Andrea G., Compostrini R., Babonneau F., and Mariotto G. J. Am. Ceram. Soc. 78 (1995) 379
9. Kamiya K., Yoko T., Sano T., and Tanaka K. J. Non-Cryst. Solids 119 (1990) 14
10. Kamiya K., Katayama A., Suzuki H., Nishida K., Hashimoto T., Matsuoka J., and Nasu H. J. Sol-Gel Sci. Technol. 14 (1999) 95
11. Trimmel G., Badheka R., and Babonneau F. J. Sol-Gel Sci. Technol. 26 (2003) 279
12. Chomel A.D., Dempsey P., Latournerie J., Hourlier-Bahloul D., and Jayasooriya U.A. Chem. Mater. 17 (2005) 4468
13. Soraru G.D., Pederiva L., Latournerie J., and Raj R. J. Am. Ceram. Soc. 85 (2002) 2181
14. Mutin P.H. J. Sol-Gel Sci. Technol. 14 (1999) 27
15. Bréquel H., Parmentier J., Walter S., Badheka R., Trimmel G., Masse S., Latournerie J., Dempsey P., Turquat C., Desmartin-Chomel A., Le Neindre-Prum L., Jayasooriya U.A., Hourlier D., Kleebe H.-J., Sorarù G.D., Enzo S., and Babonneau F. Chem. Mater. 16 (2004) 2585
16. Lucovsky G., Manitini M.J., Srivastava J.K., and Irene E.A. J. Vac. Sci. Technol. B 5 (1987) 530
17. Socrates G. Infrared Characteristic Group Frequencies (1994), John Wiley and Sons Ltd., Chichester p. 186
18. Pivin C., and Colombo P. J. Mater. Sci. 32 (1997) 6163
19. Mutsukura N., Inoue S.-I., and Machi Y. J. Appl. Phys. 72 (1992) 43
20. Das G., Mariotto G., and Quaranta A. J. Electrochem. Soc. 153 (2006) F46
21. Grill A., and Neumayer D.A. J. Appl. Phys. 94 (2003) 6697
22. Kim Y.-H., Hwang M.S., Kim H.J., Kim J.Y., and Lee Y. J. Appl. Phys. 90 (2001) 3367
23. Koh Y.W., Loh K.P., Rong L., Wee A.T.S., Huang L., and Sudijono J. J. Appl. Phys. 93 (2003) 1241
24. Sugahara S., Kadoya T., Usami K., Hattori T., and Matsumura M. J. Electrochem. Soc. 148 (2001) F120
25. Hourlier-Bahloul D., Latournerie J., and Dempsey P. J. Eur. Ceram. Soc. 25 (2005) 979
26. Chang T.C., Mor Y.S., Liu P.T., Tsai T.M., Chen C.W., Chu C.J., Pan F.M., Lur W., and Sze S.M. J. Elecrochem. Soc. 149 (2002) F145
27. Andideh E., Lerner M., Palmrose G., El-Mansy S., Scherban T., Xu G., and Blaine J. J. Vac. Sci. Technol. B 22 (2004) 196
28. Maex K., Baklanov M.R., Shamiryan D., Iacopi F., Brongersma S.H., and Yanovitskaya Z.S. J. Appl. Phys. 93 (2003) 8793
29. Fukushima M., Yasuda E., Teranishi Y., Nakamura K., and Tanabe Y. J. Ceram. Soc. Jpn. 112 (2004) 612
30. Pocsik I., Hundhausen M., Koos M., and Ley L. J. Non-Cryst. Solids 227 (1998) 1083
31. Ferrari A.C., and Robertson J. Phys. Rev. B 61 (2000) 14095
32. Jawahari T., Road A., and Casado J. Carbon 33 (1995) 1561
33. Nakamizo M., and Tamai K. Carbon 22 (1984) 197
34. Dillon R.O., Woollam O.J.A., and Katkanat V. Phys. Rev. B 29 (1984) 3482
35. Tuinstra R., and Koenig J.L. J. Chem. Phys. 53 (1970) 1126
36. Matthews M.J., Pimenta M.A., Dresselhaus G., Dresselhaus M.S., and Endo M. Phys. Rev. B 59 (1999) R6585
37. Hurwitz F.I., Heimann P., Farmer S.C., and Hembree Jr. D.M. J. Mater. Sci. 28 (1993) 6622
38. Sasaki Y., Nishina Y., Sato M., and Okamura K. J. Mater. Sci. 22 (1987) 443
39. Pantano C.G., Singh A.K., and Zhang H. J. Sol-Gel Sci. Technol. 14 (1999) 7
40. Yi L.X., Heitmann J., Scholz R., and Zacharias M. Appl. Phys. Lett. 81 (2002) 4248
41. Daldosso N., Das G., Larcheri S., Mariotto G., Dalba G., Pavesi L., Irrora A., Priolo F., Icona F., and Rocca F. J. Appl. Phys. 101 (2007) 113510
42. Schiavon M.A., Gervais C., Babonneau F., and Soraru G.D. J. Am. Ceram. Soc. 87 (2004) 203
43. Preiss H., Berger L.-M., and Braun M. Carbon 33 (1995) 1739