Synthesis, characterization, and mass transport properties of a self-generating single-source magnesium precursor for MOCVD of MgF2 films

Chemistry of Materials

Volumn 21, Issue 10, 2009, Pages 2062-2069

  Fragalà, Maria E ^a   Toro, Roberta G ^a   Rossi, Patrizia ^b   Dapporto, Paolo ^b   Malandrino, Graziella ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF FLORENCE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COORDINATED COMPLEXES; DEPOSITED FILMS; DIGLYME; ELEMENTAL ANALYSIS; HIGH VOLATILITY; IR SPECTROSCOPY; LOW-PRESSURE METAL-ORGANIC CHEMICAL VAPOR DEPOSITIONS; MAGNESIUM PRECURSORS; MOCVD; OCTAHEDRAL STRUCTURES; SINGLE CRYSTAL X-RAY DIFFRACTION; SINGLE-SOURCE PRECURSOR; SINGLE-STEP; SPACE GROUPS; THERMAL ANALYSIS; THERMAL STABILITY; TRICLINIC SYSTEMS;

CRYSTAL STRUCTURE; MAGNESIUM; MAGNESIUM PRINTING PLATES; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC CHEMICALS; SYNTHESIS (CHEMICAL); THERMOGRAVIMETRIC ANALYSIS; TRANSPORT PROPERTIES; VAPORS;

COORDINATION REACTIONS;

EID: 66849099492     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm802923w     Document Type: Article

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