Volatility by Design. Synthesis and Characterization of Polyether Adducts of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium and Their Implementation as Metal-Organic Chemical Vapor Deposition Precursors

Chemistry of Materials

Volumn 9, Issue 7, 1997, Pages 1638-1648

  Belot, John A ^a   Neumayer, Deborah A ^a   Reedy, Charles J ^a   Studebaker, Daniel B ^a   Hinds, Bruce J ^a   Stern, Charlotte L ^a   Marks, Tobin J ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001716719     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm9700108     Document Type: Article

References (75)

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