Synthesis and characterization of novel self-generating liquid MOCVD precursors for thin films of zinc oxide

Chemistry of Materials

Volumn 12, Issue 2, 2000, Pages 548-554

  Gulino, Antonino ^a   Castelli, Francesco ^a   Dapporto, Paolo ^b   Rossi, Patrizia ^b   Fragalà, Ignazio ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF FLORENCE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

METAL; POLYETHER; SILICON DIOXIDE; WATER; ZINC COMPLEX; ZINC OXIDE;

ARTICLE; CHEMICAL ANALYSIS; CHEMICAL STRUCTURE; CRYSTAL STRUCTURE; DIFFERENTIAL SCANNING CALORIMETRY; EVAPORATION; FILM; FOURIER TRANSFORMATION; HEATING; MASS SPECTROMETRY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHASE TRANSITION; STOICHIOMETRY; STRUCTURE ANALYSIS; SYNTHESIS; THERMAL ANALYSIS; THERMOGRAVIMETRY; ULTRAVIOLET SPECTROPHOTOMETRY; X RAY CRYSTALLOGRAPHY;

EID: 0033807639     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm991154k     Document Type: Article

References (67)

1. Henrich, V. E.; Cox, P. A. The Surface Science of Metal Oxides; Cambridge University Press: Cambridge, 1994.
2. McCoy, M. A.; Grimes, R. W.; Lee, W. E. J. Mater. Res. 1996, 11, 2009.
3. Abrahams, S. C.; Bernstein, J. L. Acta Crystallogr. 1969, B25, 1233.
4. Studenikin, S. A.; Golego, N.; Cocivera, M. J Appl. Phys. 1998, 84, 5001.
5. Miller, B. J. A.; Maertin-Luengo, M. A.; Vong, M. S. W.; Wang, Y.; Self, V. A.; Chapman, S. M.; Sermon, P. A. J. Mater. Chem. 1997, 7, 2155.
6. Roth, A. P.; Webb, J. B.; Williams, D. F. Phys. Rev. B 1982, 25, 7836.
7. Srikant, V.; Clark, D. R. J. Mater. Res. 1997, 12, 1425.
8. Tang, W.; Cameron, D. C. Thin Solid Films 1994, 238, 83.
9. Wang, R.; Sleight, A. W.; Cleary. D. Chem. Mater. 1996, 8, 433.
10. Agarwal, G.; Speyer, R. F. J. Mater. Res. 1997, 12, 2447.
11. Palmer, G. B.; Poeppelmeier, K. R.; Mason, T. O. Chem. Mater. 1997, 9, 3121.
12. Wu, X.; Coutts, T. J.; Mulligan, P. W. J. Vac. Sci. Technol. A 1997, 15, 1057.
13. Djembo-Taty, K.; Plaindoux, L.; Kossanyi, J.; Ronfard-Haret, J. C. J. Chim. Phys. 1998, 95, 595.
14. Kazeoka, M.; Hiramatsu, H.; Seo, W.; Koumoto, K. J Mater. Res. 1998, 13, 523.
15. Tsubota, T.; Ohtaki, M.; Eguchi, K.; Arai H. J. Mater. Chem. 1998, 8, 409.
16. Chopra, K. L.; Das, S. R. Thin Film Solar Cells; Plenum: New York, 1983.
17. Shih W.-C.; Wu, M.-S. J. Cryst. Growth 1994, 137, 319.
18. Ohtomo, A.; Kawasaki, M.; Koida, T.; Masubuchi, K.; Koinuma, H.; Sakurai, Y.; Yoshida, Y.; Yasuda, T.: Segawa, Y. Appl. Phys. Lett. 1998, 72, 2466.
19. Lin, F.-C.; Takao, Y.; Shimizu, Y.: Egashira, M. Sens. Actuators, B 1995, 24-25, 843.
20. Ramanchalam, M. S.; Rohatgi, A.; Carter, W. B.; Shaffer, J. P.: Gupta, T. K. J. Electron. Mater. 1995, 24, 413.
21. Weissenrieder, K. S.: Muller, J. Thin Solid Films 1997, 300, 30.
22. Studenikin, S. A.; Golego, N.; Cocivera, M. J Appl. Phys. 1998, 84, 2287.
23. Dahan, P.; Fleurov, V.; Thurian, P.; Heitz, R.; Hoffmann, A.; Broser, I. J. Phys.: Condens. Matter 1998, 10, 2007.
24. Egelhaaf, H.-J.: Oelkrug, D. J. Cryst. Growth 1996, 161, 190.
25. Ntep, J.-M.; Barbé, M.; Cohen-Solal, G.; Bailly, F.; Lusson, A.; Triboulet, R. J. Cryst. Growth 1998, 184/185, 1026.
26. Vispute, R. D.; Talyansky, V.; Choopun, S.; Sharma, R. P.; Venkatesan, T.; He, M.; Tang, X.; Halpern, J. B.; Spencer, M. G.; Li, Y. X.; Salamanca-Riba, L. G.; Iliadis, A. A.: Jones, K. A. Appl. Phys. Lett. 1998, 73, 348.
27. Fiddes, A. J. C.; Durose, K.; Brinkman, A. W.; Woods, J.; Coates, P. D.; Banister, A. J. J. Cryst. Growth 1996, 159, 210.
28. Benramdane, N.; Murad, W. A.; Misho, R. H.; Ziane, M.; Kebbab, Z. Mater. Chem. Phys. 1997, 48, 119.
29. Yamada, A.; Sang, B.: Konagai, M. Appl. Surf. Sci. 1997, 112, 216.
30. Tang, Z. K.; Wong, G. K. L.; Yu, P.; Kavasaki, M.; Ohtomo, A.; Koinuma, H.; Segawa, Y. Appl. Phys. Lett. 1998, 72, 3270.
31. O'Brien, P.; Saeed, T.; Knowles, J. J. Mater. Chem. 1996, 6, 1135.
32. Nyffenegger, R. M.; Craft, B.; Shaaban, M.; Gorer, S.; Erley, G.; Penner, R. M. Chem. Mater. 1998, 10, 1120.
33. Peulon, S.; Lincot, D. Adv. Mater. 1996, 8, 166.
34. Audebrand, N.; Auffrédic, J. P.; Louër, D. Chem. Mater. 1998, 10, 2450.
35. Baird, T.; Campbell, K. C.; Holliman, P. J.; Hoyle, R. W.; Stirling, D.; Williams, B. P.; Morris, M. J. Mater. Chem. 1997, 7, 319.
36. Kashani, H. J. Mater. Sci.: Mater. Electron. 1996, 7, 85.
37. Jain, S.; Kodas, T. T.; Hampden-Smith, M. Chem. Vap. Deposition 1998, 4, 51.
38. Mar, G. L.; Timbrell P. Y.; Lamnb, R. N. Chem. Mater. 1995, 7, 1890.
39. Auld, J.; Houlton, D. J.; Jones, A. C.; Rushworth, S. A.; Malik, M. A.; O'Brien, P.; Critchlow, G. W. J. Mater. Chem. 1994, 4, 1249.
40. Sato, H.; Minami, T.; Miyata, T.; Takata, S.; Ishii, M. Thin Solid Films 1994, 246, 65.
41. Hu, J.; Gordon, R. J. Appl. Phys. 1992, 71, 880.
42. Kim, S. J.; Marzouk, H. A.; Reucroft, P. J.; Hamrin, C. E., Jr. Thin Solid Films 1992, 217, 133.
43. Hu, J; Gordon, R. G. Mater. Res. Soc. Symp. Proc. 1991, 202, 457.
44. Malandrino, G.; Benelli, C.; Castelli, F.; Fragalà, I. Chem. Mater. 1998, 10, 3434.
45. Malandrino, G.; Castelli, F.; Fragalà, I. Inorg. Chim. Acta 1994, 224, 203.
46. Altomare, A.; Cascarano, G.; Giacovazzo, C.; Guagliardi, A.; Burla, M. C.; Polidori, G.; Camalli, M. J. Appl. Crystallogr. 1994, 27, 435.
47. Sheldrich, G. M. SHELX 93, Program for crystal structure determination, University Of Göttingen, Germany, 1994.
48. International Tables for X-ray Crystallography, Kynoch Press: Birmingham, U.K., 1974; Vol. 4, .
49. Nardelli, M. Comput. Chem. 1983, 7, 95.
50. Johnson, C. K. ORTEP, Rep. ORNL 3794; Oak Ridge National Laboratory, TN, 1971.
51. Gulino, A.; La Delfa, S.; Fragalà, I.; Egdell, R. G. Chem. Mater. 1996, 8, 1287.
52. Gulino, A.; Compagnini, G.; Egdell, R. G.; Fragalà, I. Thin Solid Films 1999, in press.
53. Chattoraj, S. C.; Cupka, A. G., Jr.; Sievers, R. E. J. Inorg. Nucl. Chem. 1996, 28, 1937.
54. Adams, R. P.; Allen, H. C., Jr.; Rychlewska, U.; Hodgson, D. J. Inorg. Chim. Acta 1986, 119, 67.
55. Reichert, C.; Bancroft, G. M.; Westmore, J. B. Can. J. Chem. 1970, 48, 1362.
56. Li, N. C.; Wang, S. M.; Walker, R. W. J. Inorg. Nucl. Chem. 1965, 27, 2263.
57. Graddon, D. P.; Weeden, D. G. Aust. J. Chem. 1963, 16, 980.
58. Morris, M. L.; Moshier, R. W.; Sievers, R. E. Inorg. Chem. 1963, 2, 411.
59. Iwamoto, R. Spectrochim. Acta 1971, 27A, 2385.
60. American Society for Testing and Material Powder Diffraction Files; Joint Committee on Powder Diffraction Standards; #3-888.
61. Vispute, R. D.; Talyansky, V.; Sharma, R. P.; Choopun, S.; Dowries, M.; Venkatesan, T.; Li, Y. X.; Salamanca-Riba, L. G.; Iliadis, A. A.; Jones, K. A.; McGarrity, J. Appl. Surf. Sci. 1998, 127-129, 431.
62. Oktik, S.; Russell, G. J.; Brinkman, A. W. J. Cryst. Growth 1996, 159, 195.
63. Warkm, M.; Kessler, H.; Schulz-Ekloff, G. Microporous Mater. 1997, 8, 241.
64. Swanepoel, R. J. Phys. E: Sci. Instrum. 1983, 16, 1214.
65. Schon, G. J. Electron Spectrosc. Relat. Phenom. 1973, 2, 75.
66. Gelius, U.; Heden, P. F.; Hedman, J.; Lindberg, B. J.; Manne, R.; Nordberg, R.; Nordling, C.; Siegbahn, K. Phys. Scr. 1970, 2, 70.
67. Wagner, C. D. Practical Surface Analysis, 2nd edition; Briggs, D., Seah, M. P., Eds., Wiley: Chichester, 1995; Appendix 5.