Ab initio study of the diffusion and decomposition pathways of SiHx species on Si(100)

Physical Review B - Condensed Matter and Materials Physics

Volumn 79, Issue 16, 2009, Pages

  Ceriotti, Michele ^a   Cereda, Silvia ^a   Montalenti, Francesco ^a   Miglio, Leo ^a   Bernasconi, Marco ^a  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 66349111949     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.79.165437     Document Type: Article

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