Theoretical study of the chemical vapor deposition of (100) silicon from silane

Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 24, 2001, Pages

  Musgrave, Charles B ^b  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85038344597     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.64.245330     Document Type: Article

References (60)

1. S M. Gates, C M. Greenlief, and D B. Beach, J. Chem. Phys.93, 7493 (1990).
2. H L. Duan, G A. Zaharias, and S F. Bent, Appl. Phys. Lett.78, 1784 (2000).
3. E. Srinivasan and G N. Parsons, Appl. Phys. Lett.72, 456 (1998).
4. D D. Koleske, S M. Gates, and B. Jackson, J. Chem. Phys.101, 3301 (1994).
5. M L. Wise, B G. Koehler, P. Gupta, P A. Coon, and S M. George, Surf. Sci.258, 166 (1991).
6. U. Hofer, L. Li, and T F. Heinz, Phys. Rev. B45, 9485 (1992).
7. M C. Flowers, N B H. Jonathan, Y. Liu, and A. Morris, J. Chem. Phys.99, 7038 (1993).
8. P. Nachtigall, K D. Jordan, and K C. Janda, J. Chem. Phys.95, 8652 (1991).
9. C J. Wu and E A. Carter, Chem. Phys. Lett.185, 172 (1991).
10. K W. Kolasinski, S F. Shane, and R N. Zare, J. Chem. Phys.96, 3995 (1992).
11. M P. Develyn, Y M L. Yang, and L F. Sutcu, J. Chem. Phys.96, 852 (1992).
12. J J. Boland, Phys. Rev. Lett.67, 1539 (1991).
13. Z. Jing and J L. Whitten, J. Chem. Phys.102, 3867 (1995).
14. P. Kratzer, B. Hammer, and J K. Norskov, Chem. Phys. Lett.229, 645 (1994).
15. E. Pehlke and M. Scheffler, Phys. Rev. Lett.74, 952 (1995).
16. A. Vittadini and A. Selloni, Chem. Phys. Lett.235, 334 (1995).
17. S. Pal and D. Doren, J. Chem. Phys.103, 1232 (1995).
18. P. Nachtigall and K D. Jordan, J. Chem. Phys.102, 8249 (1995).
19. P. Nachtigall, K D. Jordan, and C. Sosa, J. Chem. Phys.101, 8073 (1994).
20. J A. Steckel, T. Phung, K D. Jordan, and P. Nachtigall, J. Phys. Chem. B105, 4031 (2001).
21. P. Bratu, K L. Kompa, and U. Hofer, Chem. Phys. Lett.251, 1 (1996).
22. K W. Kolasinski, W. Nessler, A. deMeijere, and E. Hasselbrink, Phys. Rev. Lett.72, 1356 (1994).
23. C J. Wu, I V. Ionova, and E A. Carter, Surf. Sci.295, 64 (1993).
24. R J. Buss, P. Ho, W G. Breiland, and M E. Coltrin, J. Appl. Phys.63, 2808 (1988).
25. S M. Gates, C M. Greenlief, D B. Beach, and P A. Holbert, J. Chem. Phys.92, 3144 (1990).
26. A R. Brown and D J. Doren, J. Chem. Phys.110, 2643 (1999).
27. Z. Jing and J L. Whitten, Phys. Rev. B44, 1741 (1991).
28. P. Gupta, V L. Colvin, and S M. George, Phys. Rev. B37, 8234 (1988).
29. S. Ciraci and I P. Batra, Surf. Sci.178, 80 (1986).
30. S F. Shane, K W. Kolasinski, and R N. Zare, J. Chem. Phys.97, 3704 (1992).
31. A D. Becke, Phys. Rev. A38, 3098 (1988).
32. C. Lee, W. Yang, and R G. Parr, Phys. Rev. B37, 785 (1988).
33. B J. Garrison, E J. Dawnkaski, D. Srivastava, and D W. Brenner, Science255, 835 (1992).
34. S. Skokov, B. Weiner, and M. Frenklach, J. Phys. Chem.98, 7073 (1994).
35. C B. Musgrave, S J. Harris, and W A. Goddard, Chem. Phys. Lett.247, 359 (1995).
36. J K. Kang and C B. Musgrave, J. Chem. Phys.113, 7582 (2000).
37. A D. Becke, J. Chem. Phys.98, 5648 (1993).
38. L A. Curtiss, K. Raghavachari, P C. Redfern, and J A. Pople, J. Chem. Phys.106, 1063 (1997).
39. D G. Truhlar, Faraday Discuss.110, 362 (1998).
40. J A. Pople, M. Head-Gordon, and K. Raghavachari, J. Chem. Phys.87, 5968 (1987).
41. A D. McLean and G S. Chandler, J. Chem. Phys.72, 5639 (1980);
42. J. Chem. Phys.R. Ditchfield, W J. Hehre, and J A. Pople, 54, 724 (1971);
43. J. Chem. Phys.M J. Frisch, J A. Pople, and J S. Binkley, 80, 3265 (1984).
44. B W. Holland, C B. Duke, and A. Paton, Surf. Sci.140, L269 (1984).
45. R A. Wolkow, Phys. Rev. Lett.68, 2636 (1992).
46. G. Jayaram, P. Xu, and L D. Marks, Phys. Rev. Lett.71, 3489 (1993).
47. H. Tochihara, T. Amakusa, and M. Iwatsuki, Phys. Rev. B50, 12 262 (1994).
48. A W. Munz, C. Ziegler, and W. Gopel, Phys. Rev. Lett.74, 2244 (1995).
49. J. Shoemaker, L W. Burggraf, and M S. Gordon, J. Chem. Phys.112, 2994 (2000).
50. M. J. Frisch, G. W. Trucks, H. B. Schlegel, G. E. Scuseria, M. A. Robb, J. R. Cheeseman, V. G. Zakrzewski, J. A. Montgomery, Jr., R. E. Stratmann, J. C. Burant, S. Dapprich, J. M. Millam, A. D. Daniels, K. N. Kudin, M. C. Strain, O. Farkas, J. Tomasi, V. Barone, M. Cossi, R. Cammi, B. Mennucci, C. Pomelli, C. Adamo, S. Clifford, J. Ochterski, G. A. Petersson, P. Y. Ayala, Q. Cui, K. Morokuma, D. K. Malick, A. D. Rabuck, K. Raghavachari, J. B. Foresman, J. Cioslowski, J. V. Ortiz, A. G. Baboul, B. B. Stefanov, Liu A. Liashenko, P. Piskorz, I. Komaromi, R. Gomperts, R. L. Martin, D. J. Fox, T. Keith, M. A. Al-Laham, C. Y. Peng, A. Nanayakkara, C. Gonzalez, M. Challacombe, P. M. W. Gill, B. Johnson, W. Chen, M. W. Wong, J. L. Andres, M. Head-Gordon, E. S. Replogle, and J. A. Pople, GAUSSIAN98, Gaussian, Inc., Pittsburgh, PA, 1999.
51. J A. Britten, J. Tong, and C K. Westbrook, Int. Symp. Comb.23, 195 (1990).
52. H. Basch and S. Hoz, J. Phys. Chem. A101, 4416 (1997).
53. V. Barone and R. Amaud, Chem. Phys. Lett.251, 393 (1996).
54. H S. Johnston, Gas-Phase Reaction Rate Theory (Ronald Press, New York, 1996).
55. J K. Kang and C B. Musgrave, J. Chem. Phys. (to be published).
56. J H G. Owen, D R. Bowler, C M. Goringe, K. Miki, and G A D. Briggs, Phys. Rev. B54, 14 153 (1996).
57. D R. Bowler, J H G. Owen, C M. Goringe, K. Miki, and G A D. Briggs, J. Phys. D30, 7666 (2000).
58. J E. Northrup, Phys. Rev. B44, 1419 (1991).
59. Z. Jing and J L. Whitten, Phys. Rev. B46, 9544 (1992).
60. M. Shi, Y. Wang, and J W. Rabalais, Phys. Rev. B48, 1689 (1993).