The resonating star gyroscope: A novel multiple-shell silicon gyroscope with sub-5 deg/hr allan deviation bias instability

IEEE Sensors Journal

Volumn 9, Issue 6, 2009, Pages 616-624

  Zaman, Mohammad Faisal ^a,b   Sharma, Ajit ^c   Ayazi, Farrokh ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Qualtré Inc   (United States)

^c TEXAS INSTRUMENTS   (United States)

Author keywords

Mode matching; Multiple shells; SOI; Vibratory microgyroscopes

Indexed keywords

ALLAN DEVIATION; BIAS INSTABILITY; BROWNIAN NOISE; ESSENTIAL COMPONENT; EXPERIMENTAL DATA; FLEXURAL MODES; HIGH-ASPECT RATIO; IN-PLANE; IN-VACUUM; MASK PROCESS; MECHANICAL NOISE; MICRO-GYROSCOPE; MODE QUALITY; MODE-MATCHING; MULTIPLE-SHELLS; OPEN LOOPS; OPERATING FREQUENCY; RATE SENSITIVITY; RESONATING STAR GYROSCOPES; SILICON GYROSCOPES; SINGLE CRYSTALLINE SILICON; SOI; STRUCTURAL MATERIALS; THICK SOI; VIBRATORY MICROGYROSCOPES;

ASPECT RATIO; BUILDING MATERIALS; FLOORS; GYROSCOPES; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY;

SHELLS (STRUCTURES);

EID: 65849165323     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2009.2020114     Document Type: Article

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