MEMS technology- from automotive to consumer

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 59-60

  Marek, Jiri ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOTIVE INDUSTRY;

AIR MASS; AUTOMOTIVE SENSORS; AUTOMOTIVE SYSTEMS; BOSCH PROCESS; MEMS TECHNOLOGY; RELEASE ETCH; TECHNOLOGY DEVELOPMENT;

MEMS;

EID: 52249089598     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433012     Document Type: Conference Paper

References (0)