Clamped-clamped beam micro-mechanical resonators in thick-film epitaxial polysilicon technology

European Solid-State Device Research Conference

Volumn , Issue , 2002, Pages 447-450

  Galayko, Dimitri ^a   Kaiser, Andreas ^a   Legrand, Bernard ^a   Buchaillot, Lionel ^a   Combi, Chantal ^b   Collard, Dominique ^c  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b STMICROELECTRONICS   (Italy)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMECHANICAL RESONATORS; POLYSILICON;

CLAMPED-CLAMPED BEAM; DESIGN AND TESTS; MICRO-MECHANICAL; POLYSILICON LAYERS; QUALITY FACTORS; RESONANCE FREQUENCIES;

RESONATORS;

EID: 33745123079     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2002.194964     Document Type: Conference Paper

References (3)

1. Wab-Thai Hsu, John R. Clark, and Clark T.-C. Nguyen "A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators," Proceeding MEMS'01, pages 349-352, January 2001.
2. F. D. Bannon III, J.R. Clark, and C. T.-C. Nguyen, "High frequency micromechanical filters," IEEE Journal of Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
3. C. T.-C. Nguyen, "Micromechanical resonators for oscillators and filters" (invited) Proceedings, 1995 IEEE International Ultrasonics Symposium, Seattle, WA, Nov. 7-10, 1995, pp. 489-499.