Vacuum packaged low noise gyroscope with sub mdeg/s/√Hz resolution

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 359-362

  Lee, June Young ^a   Jean, Seung Hoon ^a   Jung, Hyoung Kyoon ^a   Chang, Hyun Kee ^b   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

^b Hanshin IT Tower II   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRONICS PACKAGING; ERROR ANALYSIS; Q FACTOR MEASUREMENT; SILICON; SPURIOUS SIGNAL NOISE; VACUUM; VIBRATIONS (MECHANICAL);

BIAS STABILITY; LOW NOISE GYROSCOPES; METAL INTERLAID SIOG TECHNOLOGY; VACUUM PACKAGING;

GYROSCOPES;

EID: 26844574779     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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