A DRIE CMOS-MEMS Gyroscope

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1413-1418

  Xie, Huikai ^a   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

CMOS MEMS; DRIE; Electrical isolation; Gyroscope

Indexed keywords

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; ELECTRICITY; ELECTROMAGNETISM; MICROELECTROMECHANICAL DEVICES; PRINTED CIRCUIT BOARDS; SILICON; THIN FILMS;

ELECTROMAGNETIC ACTUATION;

GYROSCOPES;

EID: 1542271323     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. H. Xie, G. K. Fedder, "A CMOS-MEMS lateral-axis gyroscope," in The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001), Interlaken, Switzerland, Jan. 21-25, 2001, p. 162-165.
2. H. Luo, X. Zhu, H. Lakdawala, L.R. Carley and G.K. Fedder, " A copper CMOS-MEMS z-axis gyroscope," in The 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, Nevada, Jan. 21-25, 2001, p. 631-634.
3. H. Xie, L. Erdmann, X. Zhu, K.J. Gabriel and G.K. Fedder, "Post-CMOS processing for high-aspect-ratio integrated silicon microstructures", to appear in Journal of Microeleclromechanical Systems, Vol. 11, No. 2, 2002.
4. G.K. Fedder, S. Santhanam, M.L. Reed, S.C. Eagle, D.F. Guillou, M.S.-C. Lu, L.R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Sensors and Actuators A, vol.A57, p.103-110.
5. P. Greiff, B. Boxenhorn, T. King, and L. Niles, "Silicon monolithic micromechanical gyroscope", TRANSDUCERS '91, San Francisco, CA, USA; 24-27 June 1991, p.966-968
6. J. Bernstein, S. Cho, A.T. King, A. Kourepenis, P. Maciel, M. Weinberg, "A micromachined comb-drive tuning fork rate gyroscope", Proceedings. IEEE. Micro Electro Mechanical Systems, Fort Lauderdale, FL, USA; 7-10 Feb. 1993, p. 143-8.
7. M.W. Putty, K. Najafi, "A micromachined vibrating ring gyroscope", Technical Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA; 13-16 June 1994, p213-220.
8. W. A. Clark, R.T. Howe, R. Horowitz, "Surface micromachined Z-axis vibratory rate gyroscope", Technical Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA; 3-6 June 1996, p.283-287.
9. T. Juneau, A.P. Pisano, J.H. Smith,"Dual axis operation of a micromachined rate gyroscope", Tranducers' 97, Chicago, IL, USA; 16-19 June 1997, p883-886.
10. J.A. Geen, S.J. Sherman, J.F. Chang and S.R. Lewis, "Single-chip surface-micromachining integrated gyroscope with 50 deg/hour root Allan variance", Digest of 2002 IEEE International Solid-State Circuits Conference, San Francisco, CA, Feb 3-7, 2002, p.426-427.
11. T.K. Tang, et. al., "A packaged silicon MEMS vibratory gyroscope for microspacecraft", MEMS'97, Nagoya, Japan; 26-30 Jan. 1997, p.500-505
12. Y. Mochida, M. Tamura, K. Ohwada, "A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes", MEMS'99, Orlando, FL, USA; 17-21 Jan. 1999, p.618-623.
13. M. Lutz, W. Golderer, J. Gerstenmeier, J. Marek, B. Maihofer, S. Mahler, H. Munzel and U. Bischof, "Aprecision Yaw Rate Sensor in Silicon Micromachining", Transducers'97, Chicago, June 16-19, 1997, p.847-850.
14. MEMCAD User's Manual, Coventor, Inc., Cary, NC 27513, http://www.coventor.com.
15. W. Hemmert, M.S. Mermelstein and D.M. Freeman, "Nanometer resolution of 3-D motions using video interference microscopy," in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems - MEMS'99, Orlando, FL, USA, January 17-21, 1999, pp. 302-308.