Experimental determination of the Q-factors of microcantilevers coated with thin metal films

Strain

Volumn 45, Issue 3, 2009, Pages 295-300

  Klempner, A R ^a   Marinis, R T ^a   Hefti, P ^a   Pryputniewicz, R J ^a  

^a WORCESTER POLYTECHNIC INSTITUTE   (United States)

Author keywords

MEMS; Microcantilever; Quality factor; Ring down; Vibrometry

Indexed keywords

ELECTRICAL CONDUCTORS; EXPERIMENTAL DETERMINATION; FUNCTION OF TIME; FUNDAMENTAL RESONANCE FREQUENCY; METALLIZATION; MICRO-CANTILEVERS; MICRO-SCALE; MICROCANTILEVER; MICROELECTROMECHANICAL SYSTEMS; OSCILLATION AMPLITUDE; Q-FACTOR; Q-FACTORS; QUALITY FACTOR; QUALITY FACTORS; RING-DOWN; SILICON MICROCANTILEVERS; TEMPERATURE DEPENDENCIES; THIN METAL FILMS; VIBROMETRY;

ALUMINUM; ATOMIC FORCE MICROSCOPY; BANDPASS FILTERS; CHEMICAL SENSORS; ELECTROSTATIC ACTUATORS; MECHANICAL PROPERTIES; MEMS; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; Q FACTOR MEASUREMENT; RESONANCE;

COMPOSITE MICROMECHANICS;

EID: 65649153287     PISSN: 00392103     EISSN: 14751305     Source Type: Journal    
DOI: 10.1111/j.1475-1305.2009.00628.x     Document Type: Article

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