Influence of Ge implantation on the mechanical properties of polycrystalline silicon microstructures

Journal of Micromechanics and Microengineering

Volumn 12, Issue 4, 2002, Pages 450-457

  Polymenakos, Stylianos ^a   Stergiou, Vassiliki C ^b   Kontos, Athanassios G ^b   Tsamis, Christos ^a   Raptis, Yannis S ^b   Tsoukalas, Dimitris ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; COMPUTER SIMULATION; DOPING (ADDITIVES); GERMANIUM; GROWTH (MATERIALS); MECHANICAL PROPERTIES; METALLOGRAPHIC MICROSTRUCTURE; MICROMACHINING; STRESSES;

BUILT-IN STRESS; COUNTERBALANCING EFFECT; PULL-IN VOLTAGE;

POLYSILICON;

EID: 0036646620     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/4/318     Document Type: Article

References (22)

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