Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopy

Journal of Microelectromechanical Systems

Volumn 11, Issue 4, 2002, Pages 317-321

  Grow, Randal J ^a,b   Minne, Stephen C ^c   Manalis, Scott R ^d   Quate, Calvin F ^a,b  

^a IEEE   (United States)

^b STANFORD UNIVERSITY   (United States)

^c Nanodevices Inc   (United States)

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Atomic force microscopy (AFM); Microfabricated cantilevers; Microfabricated tips; Micromachining; Oxidation sharpening

Indexed keywords

SILICON NITRIDE CANTILEVERS;

ATOMIC FORCE MICROSCOPY; ETCHING; IMAGING TECHNIQUES; OXIDATION; SILICON NITRIDE; SILICON WAFERS; THERMAL NOISE; THIN FILMS;

CANTILEVER BEAMS;

EID: 0036687949     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.800924     Document Type: Article

References (14)

1. Atomic force microscope
2. Atomic-scale friction of a tungsten tip on a graphite surface
3. Imaging crystals; polymers; and processes in water with the atomic force microscope
4. Microfabrication of cantilever styli for the atomic force microscope
5. The oxidation of shaped silicon surfaces
6. Formation of silicon tips with less-than-1 Nm radius
7. Improved atomic force microscope images using microcantilevers with sharp tips
8. Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy
9. Calibration of atomic-force microscope tips
10. Method for the calibration of atomic-force microscope cantilevers
11. Calibration of rectangular atomic force microscope cantilevers
12. Calibration of atomic force microscope cantilevers