Influence of bending-extension coupling on the modal frequencies of nonsymmetrically laminated MEMS microcantilevers

Journal of Microelectromechanical Systems

Volumn 14, Issue 6, 2005, Pages 1236-1243

  Gibson, Ronald F ^a   Liu, Zhengyu ^b   Srinivasan, Niranjan ^a  

^a Wayne State University   (United States)

^b FORD MOTOR COMPANY   (United States)

Author keywords

Microelectromechanical devices; Modeling; Vibrations

Indexed keywords

CANTILEVER BEAMS; CHEMICAL SENSORS; FINITE ELEMENT METHOD; LAMINATED COMPOSITES; MATHEMATICAL MODELS; MODAL ANALYSIS; VIBRATIONS (MECHANICAL);

BENDING-EXTENSION COUPLING; MICROCANTILEVERS; MODAL FREQUENCIES;

MICROELECTROMECHANICAL DEVICES;

EID: 29244457570     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.859078     Document Type: Article

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