Submicrometer comb-drive actuators fabricated on thin single crystalline silicon layer

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 4, 2009, Pages 991-995

  Takahashi, Kazunori ^a   Bulgan, Erdal ^a   Kanamori, Yoshiaki ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Actuators; Microelectromechanical devices; Micromachining

Indexed keywords

A-FRAMES; AC VOLTAGES; AIR GAPS; COMB DRIVES; COMB ELECTRODES; COMB-DRIVE ACTUATORS; ELECTRICAL CHARACTERISTICS; OSCILLATION AMPLITUDES; SILICON LAYERS; SILICON-ON-INSULATOR WAFERS; SINGLE CRYSTALLINE SILICONS; SPRING CONSTANTS; SUB MICROMETERS;

COMPOSITE MICROMECHANICS; ELECTRON BEAMS; FABRICATION; MICROACTUATORS; MICROMACHINING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

MICROELECTROMECHANICAL DEVICES;

EID: 65549167501     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2008.2006934     Document Type: Conference Paper

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