High aspect ratio vertical cantilever RF-MEMS variable capacitor

IEEE Microwave and Wireless Components Letters

Volumn 17, Issue 2, 2007, Pages 127-129

  Klymyshyn, David M ^a,b   Haluzan, Darcy T ^a,b   Börner, Martin ^c   Achenbach, Sven ^b   Mohr, Jürgen ^c   Mappes, Timo ^c  

^a IEEE   (Canada)

^b UNIVERSITY OF SASKATCHEWAN   (Canada)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

Capacitors; Microelectromechanical devices; Micromachining; Microwave devices; Microwave switches; Varactors; X ray lithography

Indexed keywords

ASPECT RATIO MICROSTRUCTURE; MICROWAVE SWITCHES; VARIABLE CAPACITOR;

ASPECT RATIO; CAPACITANCE; CAPACITORS; MICROMACHINING; MICROWAVE DEVICES; VARACTORS; X RAY LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 33847737445     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2006.890338     Document Type: Article

References (9)

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