Submicron silicon waveguide optical switch driven by microelectromechanical actuator

Applied Physics Letters

Volumn 92, Issue 10, 2008, Pages

  Bulgan, Erdal ^a   Kanamori, Yoshiaki ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES; SILICON WAFERS; WAVEGUIDES;

ELECTROSTATIC COMB ACTUATOR; EXTINCTION RATIO; MICROELECTROMECHANICAL ACTUATOR; SILICON SPRINGS;

MICROACTUATORS;

EID: 40849127028     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2892677     Document Type: Article

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