Deposited silicon high-speed integrated electro-optic modulator

Optics Express

Volumn 17, Issue 7, 2009, Pages 5118-5124

  Preston, Kyle ^a   Manipatruni, Sasikanth ^a   Giendarenko, Alexander ^a   Poitras, Carl B ^a   Lipson, Michal ^a  

^a School of Chemical and Molecular Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSIONS; ELECTROOPTICAL DEVICES; LIGHT MODULATION; MICROELECTRONICS; MODULATORS; SILICON; SILICON ON INSULATOR TECHNOLOGY;

ACTIVE OPTICAL DEVICES; ELECTRICAL CARRIERS; ELECTRO-OPTIC MODULATORS; FREE-CARRIER PLASMA DISPERSION EFFECTS; HIGH QUALITY FACTORS; INTEGRATED ELECTRO-OPTICS; MICROELECTRONIC MATERIALS; SILICON-ON-INSULATOR PLATFORMS;

POLYCRYSTALLINE MATERIALS;

SILICON;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; ELECTROMAGNETIC FIELD; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LIGHT; OPTICAL INSTRUMENTATION; RADIATION EXPOSURE; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SIGNAL PROCESSING; SYSTEM ANALYSIS; TRANSDUCER;

COMPUTER-AIDED DESIGN; ELECTROMAGNETIC FIELDS; ELECTRONICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LIGHT; OPTICAL DEVICES; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SIGNAL PROCESSING, COMPUTER-ASSISTED; SILICON; SYSTEMS INTEGRATION; TRANSDUCERS;

EID: 65249190810     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.005118     Document Type: Article

References (36)

1. D. A. B. Miller, "Rationale and challenges for optical interconnects to electronic chips," Proc. IEEE 88, 728-749 (2000).
2. A. Shacham, K. Bergman, and L. P. Carloni, "Photonic Networks-on-Chip for Future Generations of Chip Multiprocessors," IEEE Trans. Comput. 57, 1246-1260 (2008).
3. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615- 618 (2004).
4. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, "High-speed optical modulation based on carrier depletion in a silicon waveguide," Opt. Express 15, 660-668 (2007).
5. W. M. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultra-compact, low RF power, 10 Gb/s silicon Mach-Zehnder modulator," Opt. Express 15, 17106-17113 (2007).
6. D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, "Low loss and high speed silicon optical modulator based on a lateral earner depletion structure," Opt. Express 16, 334-339 (2008).
7. S. J. Spector, M. W. Geis, G. R. Zhou, M. E. Grein, F. Gan, M. A. Popovic, J. U. Yoon, D. M. Lennon, E. P. Ippen, F. Z. Kärtner, and T. M. Lyszczarz, "CMOS-compatible dual-output silicon modulator for analog signal processing," Opt. Express 16, 11027-11031 (2008).
8. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005).
9. S. Manipatrani, X. Qianfan, B. Schmidt, J. Shakya, and M. Lipson, "High Speed Carrier Injection 18 Gb/s Silicon Micro-ring Electro-optic Modulator," in Proceedings of Lasers and Electro-Optics Society (IEEE, 2007), pp.537-538.
10. M. R. Watts, D. C. Trotter, R. W. Young, and A. L. Lentine, "Ultralow power silicon microdisk modulators and switches," in 5th IEEE International Conference on Group IV Photonics (IEEE, 2008), pp. 4-6.
11. J.-B. You, M. Park, J.-W. Park, and G. Kim, "12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode," Opt. Express 16, 18340-18344 (2008).
12. G. K. Celler and S. Cristoloveanu, "Frontiers of silicon-on-insulator," J. Appl. Phys. 93, 4955-4978 (2003).
13. J. S. Orcutt, A. Khilo, M. A. Popovic, C. W. Holzwarth, B. Moss, H. Li, M. S. Dahlem, T. D. Bonifield, F. X. Kaertner, E. P. Ippen, J. L. Hoyt, R. J. Ram, and V. Stojanovic, "Demonstration of an Electronic Photonic Integrated Circuit in a Commercial Scaled Bulk CMOS Process," in Conference on Lasers and Electro-Optics (Optical Society of America, 2008), paper CTuBB3.
14. C. W. Holzwarth, J. S. Orcutt, H. Li, M. A. Popovic, V. Stojanovic, J. L. Hoyt, R. J. Ram, and H. I. Smith, "Localized Substrate Removal Technique Enabling Strong-Confinement Microphotonics in Bulk Si CMOS Processes," in Conference on Lasers and Electro-Optics (Optical Society of America, 2008), paper CThKK5.
15. K. Banerjee, S. J. Souri, P. Kapur, and K. C. Saraswat, "3-D ICs: a novel chip design for improving deep- submicrometer interconnect performance and systems-on-chip integration," Proc. IEEE 89, 602-633 (2001).
16. A. W. Topol, J. D. C. La Tulipe, L. Shi, D. J. Frank, K. Bernstein, S. E. Steen, A. Kumar, G. U. Singco, A. M. Young, K. W. Guarini. and M. Ieong, "Three-dimensional integrated circuits," IBM J. Res. and Dev. 50, 491-506 (2006).
17. M. Beals, J. Michel, J. F. Liu, D. H. Ahn, D. Sparacin, R. Sun, C. Y. Hong, L. C. Kimerling, A. Pomerene, D. Carothers, J. Beattie, A. Kopa, A. Apsel, M. S. Rasras, D. M. Gill, S. S. Patel, K. Y. Tu, Y. K. Chen, and A. E. White, "Process flow innovations for photonic device integration in CMOS," Proc. SPIE 6898, 689804 (2008).
18. R. Amatya, C. W. Holzwarth, H. I. Smith, and R. J. Ram, "Precision Tunable Silicon Compatible Microring Filters," IEEE Photon. Technol. Lett. 20, 1739-1741 (2008).
19. M. W. Geis, S. J. Spector, R. C. Williamson, and T. M. Lyszczarz, "Submicrosecond submilliwatt silicon- on-insulator thermooptic switch," IEEE Photon. Technol. Lett. 16, 2514-2516 (2004).
20. J. Liu, M. Beals, A. Pomerene, S. Bernardis, R. Sun, J. Cheng, L. C. Kimerling, and J. Michel, "Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators," Nature Photon. 2, 433-437 (2008).
21. T. Kamins, Polycrystalline Silicon for Integrated Circuits and Displays, 2nd ed. (Kluwer, 1998).
22. L. Liao, D. R. Lim, A. M. Agarwal, X. Duan, K. K. Lee, and L, C. Kimerling, "Optical transmission losses in polycrystalline silicon strip waveguides," J. Electron. Mater. 29, 1380-1386 (2000).
23. S. Selvaraja, M. Schaekers, W. Bogaerts, D. V. Thourhout, and R. Baets, "Polycrystalline silicon as waveguide material for advanced photonic applications," in Proceedings of 11th IEEE/LEOS Benelux Annual Workshop (IEEE/LEOS, 2007), pp.19-20.
24. Q. Fang, J. F. Song, S. H. Tao, M. B. Yu, G. Q. Lo, and D. L. Kwong, "Low loss (̃6.45dB/cm) sub- micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler," Opt. Express 16, 6425-6432 (2008).
25. K. Preston, B. Schmidt, and M. Lipson, "Polysilicon photonic resonators for large-scale 3D integration of optical networks," Opt. Express 15, 17283-17290 (2007).
26. K. Preston, P. Dong, B. Schmidt, and M. Lipson, "High-speed all-optical modulation using polycrystalline silicon microring resonators," Appl. Phys. Lett. 92, 151104 (2008).
27. M. Dutoit and F. Sollberger, "Lateral Polysilicon p-n Diodes," J. Electrochem. Soc. 125, 1648-1651 (1978).
28. S. V. Karnik and M. K. Hatalis, "Lateral polysilicon p+-p-n+ and p+-n-n+ diodes," Solid-State Electron. 47, 653-659 (2003).
29. R. Soref and B. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23, 123-129 (1987).
30. C. R. M. Grovenor, "Grain boundaries in semiconductors," J. Phys. C 18, 4079-4119 (1985).
31. S. Manipatruni, Q. Xu, and M. Lipson, "PINIP based high-speed high-extinction ratio micron-size silicon electrooptic modulator," Opt. Express 15, 13035-13042 (2007).
32. Q. Xu, S. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, "12.5 Gbit/s carrier-injection-based silicon micro-ring silicon modulators," Opt. Express 15, 430-436 (2007).
33. Q. Xu, D. Fattal, and R. G. Beausoleil, "Silicon microring resonators with 1.5-μm radius," Opt. Express 16, 4309-4315 (2008).
34. J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, "Photonic-bandgap microcavities in optical waveguides," Nature 390, 143-145 (1997).
35. B. Schmidt, Q. Xu, J. Shakya, S. Manipatruni, and M. Lipson, "Compact electro-optic modulator on silicon-on-insulator substrates using cavities with ultra-small modal volumes," Opt. Express 15, 3140- 3148 (2007).
36. A. T. Voutsas, "Laser Crystallization of Thin Films for Flat Panel Display Applications," in Recent Advances in Laser Processing of Materials, J. Perriere, E. Millon, and E. Fogarassy, eds. (Elsevier, New York, 2006), pp. 317-373