Silicon microring resonators with 1.5-μm radius

Optics Express

Volumn 16, Issue 6, 2008, Pages 4309-4315

  Xu, Qianfan ^a   Fattal, David ^a   Beausoleil, Raymond G ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SCATTERING; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICON; WAVEGUIDE JUNCTIONS;

CRITICAL DIMENSIONS; MICRORINGS; SILICON STRIPS; SIZE LIMITS;

RESONATORS;

SILICON;

ARTICLE; CHEMISTRY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; OPTICS; TRANSDUCER; VIBRATION;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MINIATURIZATION; OPTICS; SILICON; TRANSDUCERS; VIBRATION;

EID: 41149143820     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.004309     Document Type: Article

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