Precision tunable silicon compatible microring filters

IEEE Photonics Technology Letters

Volumn 20, Issue 20, 2008, Pages 1739-1741

  Amatya, Reja ^a   Holzwarth, Charles W ^b   Smith, Henry I ^a   Ram, Rajeev J ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

^b Massachusetts Institute of Technology   (United States)

Author keywords

Microring resonator; Silicon nitride; Thermal tuning

Indexed keywords

DEMULTIPLEXING; ERRORS; INTEGRATED CIRCUITS; INTEGRATED OPTOELECTRONICS; NETWORKS (CIRCUITS); NITRIDES; OPTICAL RESONATORS; RESONATORS; SENSOR NETWORKS; SILICON; SILICON NITRIDE; TUNING; WAVE FILTERS;

ANALOG-TO-DIGITAL CONVERTERS; EFFICIENT; ENVIRONMENTAL TEMPERATURES; FABRICATION ERRORS; FEEDBACK CIRCUITS; MICRORING FILTERS; MICRORING RESONATOR; MICRORING RESONATORS; ON-CHIP; PASSBAND FILTERS; PHOTONIC INTEGRATED CIRCUITS; RESISTIVE HEATERS; RESONANT FREQUENCIES; TARGET VALUES; THERMAL TUNING; TIMING ERRORS;

NATURAL FREQUENCIES;

EID: 54049083878     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2008.2004680     Document Type: Article

References (13)

1. R. A. Soref, "Silicon-based optoelectronics," Proc. IEEE, vol. 81, no. 12, pp. 1687-1706, Dec. 1993.
2. B. E. Little, "Advances in microring resonators, Invited Talk," presented at the Integrated Photonics Research Conf., Washington, DC, 2003.
3. F. X. Kaertner, R. Amatya, G. Barbastathis, H. Byun, F. Gan, C. W. Holzwarth, J. L. Hoyt, E. P. Ippen, O. O. Olubuyyide, J. S. Orcutt, M. Park, M. Perrott, M. A. Popovic, P. T. Rakich, R. J. Ram, H. I. Smith, M. Geis, M. Grein, T. Lyszczarz, S. Spector, and J. U. Yoon, "Silicon electronic photonic integrated circuits for high speed analog to digital conversion," in 3rd IEEE Int. Conf. Group IV Photonics, 2006, p. 3.
4. C. W. Holzwarth, T. Barwicz, and H. I. Smith, "Optimization of hydrogen Silsequioxane films for photonic applications," presented at the EIPBN, Denver, CO, 2007.
5. T. Barwicz, M. A. Popovic, P. T. Rakich, M. R. Watts, H. A. Haus, E. P. Ippen, and H. I. Smith, "Microring-resonator-based add-drop filters in SiN: Fabrication and analysis," Opt. Express, vol. 12, no. 7, pp. 1437-1442, 2004.
6. R. Marz, Optical Waveguide Theory. Boston: Artech House, 1995.
7. M. Popovic, "Theory and Design of High-Index-Contrast Microphotonic Circuits," Ph.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA, 2008.
8. I. Christiaens, D. Van Thourhout, and R. Baets, "Low-power thermo-optic tuning of vertically coupled microring resonators," Electron. Lett. vol. 40, no. 9, pp. 560-561, Apr. 2004.
9. Y. Kokubun, "Wavelength selective integrated device by vertically coupled microring resonator filter," IPAP Books 2, pp. 303-316, 2005.
10. F. Gan, T. Barwicz, M. A. Popovic, M. S. Dahlem, C. W. Holzwarth, P. T. Rakich, H. I. Smith, E. P. Ippen, and F. X. Kartner, "Maximizing the thermo-optic tuning range of silicon photonic structures," in Proc. Photonics in Switching, San Fransisco, CA, 2007.
11. D. H. Geuzebroek, E. J. Klein, H. Kelderman, F. S. Tan, D. J. W. Klunder, and A. Driessen, "Thermally tunable, wide FSR switch based on micro-ring resonators," in Proc. Symp. IEEE/LEOS Benelux Chapter, Amsterdam, The Netherlands, 2002.
12. R. Amatya, C. W. Holzwarth, F. Gan, M. A. Popovic, F. X. Kaertner, H. I. Smith, and R. J. Ram, "Thermally tunable, micro-ring resonators," in Proc. Conf. Lasers and Electro-Optics (CLEO), Baltimore, MD, 2007.
13. P. Heimale, P. Katila, J. Aarnio, and A. Heinamaki, "Thermally tunable integrated optical ring resonator with poly-Si thermistor," J. Lightw. Technol., vol. 14, no. 10, pp. 2260-2267, Oct. 1996.