Polysilicon photonic resonators for large-scale 3D integration of optical networks

Optics Express

Volumn 15, Issue 25, 2007, Pages 17283-17290

  Preston, Kyle ^a   Schmidt, Bradley ^a   Lipson, Michal ^a  

^a School of Chemical and Molecular Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; LSI CIRCUITS; POLYCRYSTALLINE MATERIALS; POLYSILICON; RESONATORS; WAVEGUIDES;

CMOS MICROELECTRONICS; CRYSTALLINE SILICON WAVEGUIDES; OPTICAL MICRORESONATORS;

FIBER OPTIC NETWORKS;

EID: 37149001182     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.017283     Document Type: Article

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