Low loss (∼6.45dB/cm) sub-micron polycrystalline silicon waveguide integrated with efficient SiON waveguide coupler

Optics Express

Volumn 16, Issue 9, 2008, Pages 6425-6432

  Fang, Q ^a   Song, J F ^a,b   Tao, S H ^a   Yu, M B ^a   Lo, G Q ^a   Kwong, D L ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

^b JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT PROPAGATION; OPTICAL FIBERS; OPTICAL LOSSES; PHOTOLITHOGRAPHY; POLYSILICON; WAVEGUIDE COUPLERS;

POLARIZATION-MAINTAINING FIBER (PMF); POLYCRYSTALLINE SILICON WAVEGUIDES; PROPAGATION LOSS; UV LITHOGRAPHY;

OPTICAL WAVEGUIDES;

SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; COMPUTER SIMULATION; CRYSTALLOGRAPHY; INSTRUMENTATION; LIGHT; OPTICS; RADIATION SCATTERING; REFRACTOMETRY; SCANNING ELECTRON MICROSCOPY; TIME;

COMPUTER SIMULATION; CRYSTALLOGRAPHY; LIGHT; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, SCANNING; OPTICS; REFRACTOMETRY; SCATTERING, RADIATION; SILICON; TIME FACTORS;

EID: 43049090910     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.16.006425     Document Type: Article

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