A control approach to high-speed probe-based nanofabrication

Nanotechnology

Volumn 20, Issue 17, 2009, Pages

  Yan, Yan ^a   Zou, Qingze ^a   Lin, Zhiqun ^a  

^a Iowa State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED CONTROLS; ADVERSE EFFECTS; CONTROL APPROACHES; DEVELOPED MODELS; DYNAMIC COUPLINGS; GOLD-COATED; HIGH-SPEED; HIGH-SPEED PROBES; ITERATIVE CONTROLS; LARGE SIZES; MECHANICAL SCRATCHING; MULTI-AXIS; MULTI-AXIS MOTIONS; NANO FABRICATIONS; NONLINEAR HYSTERESIS; PIEZO-ACTUATORS; PRECISION POSITIONS; PROBE-BASED; SCANNING PROBE MICROSCOPES; SILICON SAMPLES; VIBRATIONAL DYNAMICS;

PIEZOELECTRIC ACTUATORS; PROBES; SPEED; THREE DIMENSIONAL;

FEEDFORWARD CONTROL;

GOLD; SILICON;

ACCURACY; ARTICLE; AXIS; DYNAMICS; EXPERIMENT; HYSTERESIS; MOTION; NANOFABRICATION; PARTICLE SIZE; PRIORITY JOURNAL; SAMPLE; SCANNING PROBE MICROSCOPY; SURFACE PROPERTY; VELOCITY; VIBRATION;

EID: 65149086166     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/20/17/175301     Document Type: Article

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