Theory of thermoelastic damping in micromechanical resonators with two-dimensional heat conduction

Journal of Microelectromechanical Systems

Volumn 17, Issue 2, 2008, Pages 494-502

  Prabhakar, Sairam ^a   Vengallatore, Srikar ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

Design methodology; Material science and technology; Thermoelasticity

Indexed keywords

BEAM GEOMETRIES; DESIGN METHODOLOGY; FLEXURAL MODES; GREEN'S FUNCTION METHODS; HEAT-CONDUCTION EQUATIONS; INFINITE SERIES; LOW LOSS; MATERIAL SCIENCE AND TECHNOLOGY; MEMS DESIGNS; MICRO BEAMS; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MECHANICAL RESONATORS; MODE SHAPES; NANOMECHANICAL RESONATORS; REPRESENTATIVE CASE; SINGLE-CRYSTAL SILICONS; STRUCTURAL BOUNDARIES; THERMOELASTIC DAMPING; TWO-DIMENSIONAL HEAT CONDUCTIONS;

ASPECT RATIO; COMPOSITE MICROMECHANICS; DAMPING; DESIGN; ELASTICITY; GREEN'S FUNCTION; MEMS; MICROELECTROMECHANICAL DEVICES; PRESSURE DROP; RESONATORS; THERMOELASTICITY;

HEAT CONDUCTION;

EID: 64449087982     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.916316     Document Type: Article

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