Modal analysis of microcantilever sensors with environmental damping

Journal of Applied Physics

Volumn 97, Issue 8, 2005, Pages

  Dareing, Don W ^a   Thundat, Thomas ^b   Jeon, Sangmin ^b   Nicholson, Matthew ^c  

^a University of Tennessee Knoxville   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENVIRONMENTAL DAMPING; MICROCANTILEVER SENSORS; PHASE ANGLE; VIBRATION RESPONSE; VISCOUS DAMPING;

ATOMIC FORCE MICROSCOPY; DAMPING; MODAL ANALYSIS; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL); VISCOUS FLOW;

SENSORS;

EID: 21444451424     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1880472     Document Type: Article

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