The effect of 'warm' gas scattering on the deceleration of energetic atoms: Monte Carlo study of the sputter-deposition of compounds

Applied Surface Science

Volumn 113-114, Issue , 1997, Pages 642-646

  Nakano, Takeo ^a   Mori, Isao ^a   Baba, Shigeru ^a  

^a SEIKEI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COMPOSITION EFFECTS; DECELERATION; FILMS; GASES; MASS TRANSFER; MONTE CARLO METHODS; PARTICLES (PARTICULATE MATTER); SCATTERING; SPUTTER DEPOSITION; VELOCITY;

ENERGETIC ATOMS; LANTHANUM BORIDE; WARM GAS SCATTERING;

LANTHANUM COMPOUNDS;

EID: 17744420410     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00817-3     Document Type: Article

References (8)

1. R.E. Somekh, J. Vac. Sci. Technol. 2 (1984) 1285.
2. T. Motohiro and Y. Taga, Thin Solid Films 112 (1984) 161.
3. G.M. Turner, I.S. Falconer, B.W. James and D.R. McKenzie, J. Appl. Phys. 65 (1989) 3671.
4. T. Nakano and S. Baba, in: IVC-13/ICSS-9, Yokohama (The Vacuum Society of Japan, Tokyo, 1995).
5. S.M. Rossnagel, I. Yang and J.J. Cuomo, Thin Solid Films 199 (1991) 59.
6. S.C. Wu, H.T. Hsu, F.H. Chen, W.R. Chang and T.Y. Tseng, J. Mater. Sci. Lett. 29 (1994) 5593.
7. J. Jeans, The Dynamical Theory of Gases (Dover, Dover, 1954). 7
8. A.A. Abrahamson, Phys. Rev. 178 (1969) 76.