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Volumn 94, Issue 12, 2009, Pages

Metal-oxide-semiconductor capacitors with erbium oxide dielectrics on In0.53 Ga0.47 As channels

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; CAPACITANCE; CAPACITORS; ELECTRIC CONDUCTIVITY; ERBIUM; MOS CAPACITORS; PLATINUM; SEMICONDUCTOR MATERIALS; SUGAR (SUCROSE);

EID: 63549117403     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3106618     Document Type: Article
Times cited : (11)

References (23)
  • 15
    • 36449003275 scopus 로고
    • 0021-8979 10.1063/1.353856.
    • R. D. Shannon, J. Appl. Phys. 0021-8979 10.1063/1.353856 73, 348 (1993).
    • (1993) J. Appl. Phys. , vol.73 , pp. 348
    • Shannon, R.D.1
  • 16
    • 63549117022 scopus 로고    scopus 로고
    • (unpublished).
    • D. Schlom (unpublished).
    • Schlom, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.