Tomographic study of atomic-scale redistribution of platinum during the silicidation of Ni0.95 Pt0.05 /Si (100) thin films

Applied Physics Letters

Volumn 94, Issue 11, 2009, Pages

  Adusumilli, Praneet ^a   Lauhon, Lincoln J ^a   Seidman, David N ^a   Murray, Conal E ^b   Avayu, Ori ^c   Rosenwaks, Yossi ^c  

^a Northwestern University   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; DIAGNOSTIC RADIOGRAPHY; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; NICKEL; PHASE INTERFACES; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLID SOLUTIONS; THIN FILMS; TOMOGRAPHY;

ANNEALED STATE; ATOM-PROBE TOMOGRAPHIES; GRAIN SIZES; INTERFACIAL PHENOMENON; RELATIVE SHIFTS; SHORT-CIRCUIT DIFFUSIONS; SI(1 0 0 ); SILICIDATION; SOLID-SOLUTION; TOMOGRAPHIC;

PLATINUM;

EID: 63049087465     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3099970     Document Type: Article

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