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Volumn 210, Issue 1-2 SPEC., 2003, Pages 32-36
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Resolution of Kelvin probe force microscopy in ultrahigh vacuum: Comparison of experiment and simulation
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Author keywords
AFM; Electrostatic force; KPFM; Work function
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Indexed keywords
CAPACITORS;
COMPUTER SIMULATION;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR MATERIALS;
KELVIN PROBE FORCE MICROSCOPY (KPFM);
ULTRAHIGH VACUUM;
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EID: 0037474565
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/S0169-4332(02)01475-7 Document Type: Conference Paper |
Times cited : (65)
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References (15)
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