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Volumn 70, Issue 8, 2004, Pages

Kelvin probe force microscopy of semiconductor surface defects

Author keywords

[No Author keywords available]

Indexed keywords

ARTICLE; CALCULATION; DENSITY; DIELECTRIC CONSTANT; ELECTRIC POTENTIAL; ELECTRICITY; ENERGY; IMAGE QUALITY; IMAGE RECONSTRUCTION; KELVIN PROBE FORCE MICROSCOPY; MATHEMATICAL ANALYSIS; MEASUREMENT; MICROSCOPY; SEMICONDUCTOR; VACUUM;

EID: 19544376453     PISSN: 01631829     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevB.70.085320     Document Type: Article
Times cited : (184)

References (27)
  • 15
    • 85088491790 scopus 로고    scopus 로고
    • note
    • CPD will be positive (negative) if the nullifying voltage is applied to the sample (tip), respectively, see Ref. 7.
  • 17
    • 85088489760 scopus 로고    scopus 로고
    • note
    • ss) is not of an importance here, and the energy level was chosen such that the charge density obtained from the fit is not sensitive to it. The emphasis is on calculating the total surface charge density, as their energy distribution cannot be determined at this stage.
  • 24
    • 5444223785 scopus 로고    scopus 로고
    • note
    • We have studied extensively the effect of the AC modulation amplitude and frequency in the past; it was found (see Ref. 7) that even for much larger VAC amplitudes and at lower frequencies, the measured CPD is unchanged.
  • 25
    • 5444257631 scopus 로고    scopus 로고
    • Ph.D. thesis, Tel-Aviv University
    • R. Shikler, Ph.D. thesis, Tel-Aviv University, 2003.
    • (2003)
    • Shikler, R.1
  • 26
    • 35949039162 scopus 로고
    • The theory of zero radius potential, see for example, E. Pantelidis, Rev. Mod. Phys. 50, 797 (1978).
    • (1978) Rev. Mod. Phys. , vol.50 , pp. 797
    • Pantelidis, E.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.