Influence of Pt addition on the texture of NiSi on Si(001)

Applied Physics Letters

Volumn 84, Issue 18, 2004, Pages 3549-3551

  Detavernier, C ^a,b   Lavoie, C ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AXIOTAXY; INTERFACE ENERGY; NATIONAL SYNCHROTRON LIGHT SOURCE (NSLS); TERNARY FILMS;

AGGLOMERATION; COMPUTATIONAL METHODS; ENTROPY; EPITAXIAL GROWTH; NICKEL ALLOYS; NUCLEATION; PLATINUM; POLYCRYSTALLINE MATERIALS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SUBSTRATES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION;

TEXTURES;

EID: 2542497001     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1719276     Document Type: Article

References (10)

1. C. Detavernier, C. Lavoie, and J. M. E. Harper, MRS 2002 Fall Meeting, Symposium Proceedings, N4.12.
2. D. Mangelinck, J. Y. Dai, J. Pan, and S. K. Lahiri, Appl. Phys. Lett. 75, 1736 (1999).
3. D. Z. Chi, D. Mangelinck, J. Y. Dai, S. K. Lahiri, K. L. Pey, and C. S. Ho, Appl. Phys. Lett. 76, 3385 (2000).
4. D. Z. Chi, D. Mangelinck, S. K. Lahiri, P. S. Lee, and K. L. Pey, Appl. Phys. Lett. 78, 3256 (2001).
5. F. M. d'Heurle, J. Mater. Res. 3, 167 (1988).
6. C. Detavernier, R. L. Van Meirhaeghe, F. Cardon, and K. Maex, Phys. Rev. B 62, 12045 (2000).
7. Joint Committee on Powder Diffaction Standards (J.C.P.D.S.) 38-0844.
8. C. Detavernier, C. Lavoie, and F. M. d'Heurle, J. Appl. Phys. 93, 2510 (2003).
9. U. F. Kocks, C. N. Tome, and H. R. Wenk, Texture and Anisotropy (Cambridge University Press, Cambridge, 1998).
10. C. Detavernier, A. S. Ozcan, J. Jordan-Sweet, E. A. Stach, J. Tersoff, F. M. Ross, and C. Lavoie, Nature (London) 426, 641 (2003).