Image simulation and surface reconstruction of undercut features in atomic force microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 1, 2007, Pages

  Qian, Xiaoping ^a   Villarrubia, John ^b   Tian, Fenglei ^a   Dixson, Ronald ^b  

^a Illinois Institute of Technology   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Atomic force microscopy; Critical dimension; Dilation; Erosion; Image reconstruction; Mathematical morphology; Metrology; Scanning probe microscopy

Indexed keywords

CRITICAL DIMENSION ATOMIC FORCE MICROSCOPES; DILATION; SERVOCONTROL;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; EROSION; IMAGE RECONSTRUCTION; MATHEMATICAL MORPHOLOGY; SURFACE RECONSTRUCTION;

FEATURE EXTRACTION;

EID: 35148885646     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712399     Document Type: Conference Paper

References (11)

1. Y. Martin and H. K. Wickramasinghe, "Method for imaging sidewalls by atomic force microscopy," Applied Physics Letter, Vol. 64, pp. 2498-2500 (1994).
2. N. G. Orji and R. G. Dixson "Higher order tip effects in traceable CD-AFM-based linewidth measurements". Meas. Sci. Technol. 18, pp. 448-455 (2007).
3. N. G. Orji, R. G. Dixson, A. Martinez, B. D. Bunday, J. A Allgair, T. V. Vorburger "Progress on Implementation of a CD-AFM-Based Reference Measurement System," Journal of Micro/Nanolithography, MEMS and MOEMS, to be published.
4. G. Dahlen, M. Osborn, N. Okulan, W. Foreman, A. Chand, and J. Foucher, "Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy," J. Vac. Sci. Technol. B23, pp. 2297-2303 (2005).
5. X. Qian and J. S. Villarrubia, "General three-dimensional image simulation and surface reconstruction in scanning probe microscopy using a dexel representation," Ultramicroscopy, 2007, in press.
6. J. S. Villarrubia, "Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation," J. Res. Nat. Inst. Stand. Technol. 102, pp. 425 - 454, (1997), http://nvl.nist.gov/pub/ nistpubs/jres/102/4/j24vil.pdf
7. J. S. Villarrubia, "Morphological estimation of tip geometry for scanned probe microscopy," Surf. Sci. 321, 287 (1994).
8. E. E. Hartquist, J. P. Menon, K. Suresh, H. B. Voelcker, and J. Zagajac, "A computing strategy for applications involving offsets, sweeps, and Minkowski operations," Computer-Aided Design 31, pp. 175-183 (1999).
9. R. M. Haralick, S. R. Sternberg, and X. Zhuang, in IEEE Transactions on Pattern Analysis and machine Intelligence, PAMI-9, pp. 532-550 (1987).
10. D. Nyyssonen, L. Landstein, and E. Coombs "Two-dimensional atomic force microprobe trench metrology system," J. Vac. Sci. Technol. B 9, pp. 3612- 3616 (1991).
11. G. Dahlen, M. Osborn, N.-C. Liu, R. Jain, W. Foreman, and J. R. Osborne, "Critical Dimension AFM tip characterization and image reconstruction applied to the 45 nm node," Proc. SPIE 6152, pp. 61522R-1-11 (2006).